Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system

A. Tsukamoto, K. Saitoh, K. Yokosawa, D. Suzuki, Y. Seki, A. Kandori, Keiji Tsukada

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

Original languageEnglish
Pages (from-to)177-180
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume15
Issue number2 PART I
DOIs
Publication statusPublished - Jun 2005

Fingerprint

SQUIDs
magnetometers
Magnetometers
fabrication
Fabrication
Throughput
thin films
Thin films
Pickups
pulsed laser deposition
Pulsed laser deposition
coils
chips
sensors
Testing

Keywords

  • Fabrication throughput
  • HTS SQUID
  • Magneto-cardiogram
  • PLD

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Tsukamoto, A., Saitoh, K., Yokosawa, K., Suzuki, D., Seki, Y., Kandori, A., & Tsukada, K. (2005). Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system. IEEE Transactions on Applied Superconductivity, 15(2 PART I), 177-180. https://doi.org/10.1109/TASC.2005.849741

Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system. / Tsukamoto, A.; Saitoh, K.; Yokosawa, K.; Suzuki, D.; Seki, Y.; Kandori, A.; Tsukada, Keiji.

In: IEEE Transactions on Applied Superconductivity, Vol. 15, No. 2 PART I, 06.2005, p. 177-180.

Research output: Contribution to journalArticle

Tsukamoto, A, Saitoh, K, Yokosawa, K, Suzuki, D, Seki, Y, Kandori, A & Tsukada, K 2005, 'Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system', IEEE Transactions on Applied Superconductivity, vol. 15, no. 2 PART I, pp. 177-180. https://doi.org/10.1109/TASC.2005.849741
Tsukamoto A, Saitoh K, Yokosawa K, Suzuki D, Seki Y, Kandori A et al. Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system. IEEE Transactions on Applied Superconductivity. 2005 Jun;15(2 PART I):177-180. https://doi.org/10.1109/TASC.2005.849741
Tsukamoto, A. ; Saitoh, K. ; Yokosawa, K. ; Suzuki, D. ; Seki, Y. ; Kandori, A. ; Tsukada, Keiji. / Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system. In: IEEE Transactions on Applied Superconductivity. 2005 ; Vol. 15, No. 2 PART I. pp. 177-180.
@article{9e05665b42a449a1b47500a7cb815229,
title = "Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system",
abstract = "We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.",
keywords = "Fabrication throughput, HTS SQUID, Magneto-cardiogram, PLD",
author = "A. Tsukamoto and K. Saitoh and K. Yokosawa and D. Suzuki and Y. Seki and A. Kandori and Keiji Tsukada",
year = "2005",
month = "6",
doi = "10.1109/TASC.2005.849741",
language = "English",
volume = "15",
pages = "177--180",
journal = "IEEE Transactions on Applied Superconductivity",
issn = "1051-8223",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2 PART I",

}

TY - JOUR

T1 - Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system

AU - Tsukamoto, A.

AU - Saitoh, K.

AU - Yokosawa, K.

AU - Suzuki, D.

AU - Seki, Y.

AU - Kandori, A.

AU - Tsukada, Keiji

PY - 2005/6

Y1 - 2005/6

N2 - We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

AB - We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

KW - Fabrication throughput

KW - HTS SQUID

KW - Magneto-cardiogram

KW - PLD

UR - http://www.scopus.com/inward/record.url?scp=21944457970&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=21944457970&partnerID=8YFLogxK

U2 - 10.1109/TASC.2005.849741

DO - 10.1109/TASC.2005.849741

M3 - Article

VL - 15

SP - 177

EP - 180

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

SN - 1051-8223

IS - 2 PART I

ER -