Preparation of PbTiO3 films by activated reactive evaporation (ARE)

Toshihiko Okamura, Kiichi Oda, Jun Takada, Akiyoshi Osaka, Yoshinari Miura, Takahito Terashima, Yoshichika Bando

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

PbTiO3 thin films were prepared by activated reactive evaporation (ARE) through controlling the evaporation rates of Pb and Ti, O2 pressure, and substrate temperature. The Pb/Ti ratio depended on the evaporation rate of Ti. When the substrate temperature and O2 pressure were held at 600°C and 1.6 × 10-4 Torr, respectively, the optimum evaporation rates of Ti and Pb for a nearly stoichiometric film were 0.2 and 1.2-1.8 angstrom/s, respectively. PbTiO3 films deposited on a c-plane of sapphire showed a preferred orientation of the (111) plane. Those on (100) plane of MgO showed strong c-axis orientation. AES depth profile measurements and SEM observations indicated that these films were uniform in composition and dense.

Original languageEnglish
Pages (from-to)749-753
Number of pages5
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume98
Issue number8
Publication statusPublished - 1990
Externally publishedYes

Fingerprint

evaporation rate
Evaporation
evaporation
preparation
Aluminum Oxide
sapphire
Substrates
Sapphire
scanning electron microscopy
temperature
thin films
profiles
Thin films
Temperature
Scanning electron microscopy
Chemical analysis

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Okamura, T., Oda, K., Takada, J., Osaka, A., Miura, Y., Terashima, T., & Bando, Y. (1990). Preparation of PbTiO3 films by activated reactive evaporation (ARE). Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, 98(8), 749-753.

Preparation of PbTiO3 films by activated reactive evaporation (ARE). / Okamura, Toshihiko; Oda, Kiichi; Takada, Jun; Osaka, Akiyoshi; Miura, Yoshinari; Terashima, Takahito; Bando, Yoshichika.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 98, No. 8, 1990, p. 749-753.

Research output: Contribution to journalArticle

Okamura, T, Oda, K, Takada, J, Osaka, A, Miura, Y, Terashima, T & Bando, Y 1990, 'Preparation of PbTiO3 films by activated reactive evaporation (ARE)', Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, vol. 98, no. 8, pp. 749-753.
Okamura, Toshihiko ; Oda, Kiichi ; Takada, Jun ; Osaka, Akiyoshi ; Miura, Yoshinari ; Terashima, Takahito ; Bando, Yoshichika. / Preparation of PbTiO3 films by activated reactive evaporation (ARE). In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan. 1990 ; Vol. 98, No. 8. pp. 749-753.
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