Preparation and characterization of TiO2 thin films using vacuum ultraviolet light in a sol-gel process

Ken Ichi Katsumata, Akira Nakajima, Naoya Yoshida, Toshiya Watanabe, Yoshikazu Kameshima, Kiyoshi Okada

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


In the current work, we prepared TiO2 thin films using vacuum ultraviolet (VUV) irradiation of several different intensities before firing. We then investigated effects of VUV intensity and alkoxide mixtures on the microstructural evolution of the films. The microstructure of the film without VUV treatment comprises uniform anatase grains. Grains in films with VUV irradiation gradually form a domain-like microstructure with increasing VUV intensity. The heterogeneous hydrolysis rate in the mixed alkoxide will trigger formation of the domain-like microstructure.

Original languageEnglish
Pages (from-to)197-205
Number of pages9
JournalSurface Science
Issue number1-3
Publication statusPublished - Dec 10 2005
Externally publishedYes


  • Photoinduced hydrophilicity
  • Sol-gel
  • Thin film
  • Titanium dioxide

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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