Preparation and characterization of TiO2 thin films using vacuum ultraviolet light in a sol-gel process

Ken Ichi Katsumata, Akira Nakajima, Naoya Yoshida, Toshiya Watanabe, Yoshikazu Kameshima, Kiyoshi Okada

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In the current work, we prepared TiO2 thin films using vacuum ultraviolet (VUV) irradiation of several different intensities before firing. We then investigated effects of VUV intensity and alkoxide mixtures on the microstructural evolution of the films. The microstructure of the film without VUV treatment comprises uniform anatase grains. Grains in films with VUV irradiation gradually form a domain-like microstructure with increasing VUV intensity. The heterogeneous hydrolysis rate in the mixed alkoxide will trigger formation of the domain-like microstructure.

Original languageEnglish
Pages (from-to)197-205
Number of pages9
JournalSurface Science
Volume596
Issue number1-3
DOIs
Publication statusPublished - Dec 10 2005
Externally publishedYes

Fingerprint

sol-gel processes
ultraviolet radiation
Sol-gel process
Vacuum
Thin films
vacuum
preparation
thin films
alkoxides
microstructure
Microstructure
Irradiation
irradiation
Microstructural evolution
anatase
Titanium dioxide
hydrolysis
Hydrolysis
actuators
Ultraviolet Rays

Keywords

  • Photoinduced hydrophilicity
  • Sol-gel
  • Thin film
  • Titanium dioxide

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Preparation and characterization of TiO2 thin films using vacuum ultraviolet light in a sol-gel process. / Katsumata, Ken Ichi; Nakajima, Akira; Yoshida, Naoya; Watanabe, Toshiya; Kameshima, Yoshikazu; Okada, Kiyoshi.

In: Surface Science, Vol. 596, No. 1-3, 10.12.2005, p. 197-205.

Research output: Contribution to journalArticle

Katsumata, Ken Ichi ; Nakajima, Akira ; Yoshida, Naoya ; Watanabe, Toshiya ; Kameshima, Yoshikazu ; Okada, Kiyoshi. / Preparation and characterization of TiO2 thin films using vacuum ultraviolet light in a sol-gel process. In: Surface Science. 2005 ; Vol. 596, No. 1-3. pp. 197-205.
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