Precision removal of ITO film by LD-pumped SHG YAG laser

Translated title of the contribution: Precision removal of ITO film by LD-pumped SHG YAG laser

Yasuhiro Okamoto, Yoshiyuki Uno, Yasuyuki Hirao

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

ITO film, which is a kind of transparent conductive film, has been used for LCD, PDP and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, processes and large-size equipments. On the other hand, laser beam processing can drastically reduces the number of process by achieving the dry process without chemicals. Therefore, selective removal of ITO film of 85nm in thickness on glass substrate by LD-pumped Q-switch SHG YAO laser is experimentally investigated. Electrical insulation across machined groove was successful. Better groove shape can be obtained by accurate control of defocused distance and feed rate under a constant average power. Using SHG YAG laser makes it possible to remove only ITO film without any damage on glass material as substrate, since SHG YAG laser of 532nm in wavelength is easy to transmit the glass material. When laser beam is irradiated from ITO film to glass, a non-removed portion of ITO film remains at the bottom of groove under long defocused distance condition. On the other hand, the non-removed portion can be prevented from remaining by backside irradiation, in which laser beam is irradiated to ITO film through glass material. Because absorption of laser beam occurs at the boundary part between ITO film and glass material.

Original languageJapanese
Pages (from-to)1564-1569
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume68
Issue number12
Publication statusPublished - Dec 2002
Externally publishedYes

Fingerprint

Lasers
Glass
Laser beams
Conductive films
Wet etching
Substrates
Liquid crystal displays
Insulation
Switches
Irradiation
Wavelength
Processing

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Precision removal of ITO film by LD-pumped SHG YAG laser. / Okamoto, Yasuhiro; Uno, Yoshiyuki; Hirao, Yasuyuki.

In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, Vol. 68, No. 12, 12.2002, p. 1564-1569.

Research output: Contribution to journalArticle

@article{4e87024be6a14bf481ed5864734539a1,
title = "Precision removal of ITO film by LD-pumped SHG YAG laser",
abstract = "ITO film, which is a kind of transparent conductive film, has been used for LCD, PDP and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, processes and large-size equipments. On the other hand, laser beam processing can drastically reduces the number of process by achieving the dry process without chemicals. Therefore, selective removal of ITO film of 85nm in thickness on glass substrate by LD-pumped Q-switch SHG YAO laser is experimentally investigated. Electrical insulation across machined groove was successful. Better groove shape can be obtained by accurate control of defocused distance and feed rate under a constant average power. Using SHG YAG laser makes it possible to remove only ITO film without any damage on glass material as substrate, since SHG YAG laser of 532nm in wavelength is easy to transmit the glass material. When laser beam is irradiated from ITO film to glass, a non-removed portion of ITO film remains at the bottom of groove under long defocused distance condition. On the other hand, the non-removed portion can be prevented from remaining by backside irradiation, in which laser beam is irradiated to ITO film through glass material. Because absorption of laser beam occurs at the boundary part between ITO film and glass material.",
keywords = "Backside irradiation, ITO film, LD-pumped, SHG YAG laser, Transparent electrode",
author = "Yasuhiro Okamoto and Yoshiyuki Uno and Yasuyuki Hirao",
year = "2002",
month = "12",
language = "Japanese",
volume = "68",
pages = "1564--1569",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "12",

}

TY - JOUR

T1 - Precision removal of ITO film by LD-pumped SHG YAG laser

AU - Okamoto, Yasuhiro

AU - Uno, Yoshiyuki

AU - Hirao, Yasuyuki

PY - 2002/12

Y1 - 2002/12

N2 - ITO film, which is a kind of transparent conductive film, has been used for LCD, PDP and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, processes and large-size equipments. On the other hand, laser beam processing can drastically reduces the number of process by achieving the dry process without chemicals. Therefore, selective removal of ITO film of 85nm in thickness on glass substrate by LD-pumped Q-switch SHG YAO laser is experimentally investigated. Electrical insulation across machined groove was successful. Better groove shape can be obtained by accurate control of defocused distance and feed rate under a constant average power. Using SHG YAG laser makes it possible to remove only ITO film without any damage on glass material as substrate, since SHG YAG laser of 532nm in wavelength is easy to transmit the glass material. When laser beam is irradiated from ITO film to glass, a non-removed portion of ITO film remains at the bottom of groove under long defocused distance condition. On the other hand, the non-removed portion can be prevented from remaining by backside irradiation, in which laser beam is irradiated to ITO film through glass material. Because absorption of laser beam occurs at the boundary part between ITO film and glass material.

AB - ITO film, which is a kind of transparent conductive film, has been used for LCD, PDP and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, processes and large-size equipments. On the other hand, laser beam processing can drastically reduces the number of process by achieving the dry process without chemicals. Therefore, selective removal of ITO film of 85nm in thickness on glass substrate by LD-pumped Q-switch SHG YAO laser is experimentally investigated. Electrical insulation across machined groove was successful. Better groove shape can be obtained by accurate control of defocused distance and feed rate under a constant average power. Using SHG YAG laser makes it possible to remove only ITO film without any damage on glass material as substrate, since SHG YAG laser of 532nm in wavelength is easy to transmit the glass material. When laser beam is irradiated from ITO film to glass, a non-removed portion of ITO film remains at the bottom of groove under long defocused distance condition. On the other hand, the non-removed portion can be prevented from remaining by backside irradiation, in which laser beam is irradiated to ITO film through glass material. Because absorption of laser beam occurs at the boundary part between ITO film and glass material.

KW - Backside irradiation

KW - ITO film

KW - LD-pumped

KW - SHG YAG laser

KW - Transparent electrode

UR - http://www.scopus.com/inward/record.url?scp=31344443453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31344443453&partnerID=8YFLogxK

M3 - Article

VL - 68

SP - 1564

EP - 1569

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

SN - 0912-0289

IS - 12

ER -