Position control of a vacuum gate valve and its evaluation

Yusuke Imai, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper considers the positioning of a motor in a vacuum gate valve which is used in a vacuum chamber. First, by using reinforcement of bearings' stiffness with permanent magnets, the fluctuation of the valve is suppressed. Next, by adjusting command signals and MR sensor's outputs, the repeatability of the positioning is improved. Moreover, three-dimensional dynamic analysis of the motor is performed by using magnetic analysis software "MagNet7." Simulation results agree with experimental results. Finally, sequential operation of the valve is performed without mechanical contact in atmosphere and vacuum.

Original languageEnglish
Title of host publication2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Pages229-234
Number of pages6
Publication statusPublished - Nov 27 2012
Externally publishedYes
Event2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 - Tokyo, Japan
Duration: Sep 18 2012Sep 21 2012

Publication series

Name2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012

Other

Other2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
CountryJapan
CityTokyo
Period9/18/129/21/12

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Imai, Y., Nakamura, Y., & Wakui, S. (2012). Position control of a vacuum gate valve and its evaluation. In 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012 (pp. 229-234). [6329715] (2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012).