PLZT film actuators deposited by a hydrothermal method

Akimasa Tonokai, Takefumi Kanda, Daisuke Yamaguchi, Koichi Suzumori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.

Original languageEnglish
Title of host publication2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages1584-1589
Number of pages6
DOIs
Publication statusPublished - Dec 1 2010
Event2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China
Duration: Dec 14 2010Dec 18 2010

Publication series

Name2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010

Other

Other2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
CountryChina
CityTianjin
Period12/14/1012/18/10

ASJC Scopus subject areas

  • Artificial Intelligence
  • Biotechnology
  • Human-Computer Interaction

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