PLZT film actuators deposited by a hydrothermal method

Akimasa Tonokai; Takefumi Kanda; Daisuke Yamaguchi; Koichi Suzumori

doi:10.1109/ROBIO.2010.5723566

PLZT film actuators deposited by a hydrothermal method

Akimasa Tonokai, Takefumi Kanda, Daisuke Yamaguchi, Koichi Suzumori

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.

Original language	English
Title of host publication	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Pages	1584-1589
Number of pages	6
DOIs	https://doi.org/10.1109/ROBIO.2010.5723566
Publication status	Published - 2010
Event	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China Duration: Dec 14 2010 → Dec 18 2010

Other

Other	2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Country	China
City	Tianjin
Period	12/14/10 → 12/18/10

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ASJC Scopus subject areas

Artificial Intelligence
Biotechnology
Human-Computer Interaction

Cite this

Tonokai, A., Kanda, T., Yamaguchi, D., & Suzumori, K. (2010). PLZT film actuators deposited by a hydrothermal method. In 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 (pp. 1584-1589). [5723566] https://doi.org/10.1109/ROBIO.2010.5723566

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Access to Document

10.1109/ROBIO.2010.5723566