TY - GEN
T1 - PLZT film actuators deposited by a hydrothermal method
AU - Tonokai, Akimasa
AU - Kanda, Takefumi
AU - Yamaguchi, Daisuke
AU - Suzumori, Koichi
PY - 2010/12/1
Y1 - 2010/12/1
N2 - Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.
AB - Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.
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U2 - 10.1109/ROBIO.2010.5723566
DO - 10.1109/ROBIO.2010.5723566
M3 - Conference contribution
AN - SCOPUS:79952918475
SN - 9781424493173
T3 - 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
SP - 1584
EP - 1589
BT - 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
T2 - 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
Y2 - 14 December 2010 through 18 December 2010
ER -