Abstract
Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.
| Original language | English |
|---|---|
| Title of host publication | 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 |
| Pages | 1584-1589 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 2010 |
| Event | 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China Duration: Dec 14 2010 → Dec 18 2010 |
Other
| Other | 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 |
|---|---|
| Country | China |
| City | Tianjin |
| Period | 12/14/10 → 12/18/10 |
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ASJC Scopus subject areas
- Artificial Intelligence
- Biotechnology
- Human-Computer Interaction
Cite this
PLZT film actuators deposited by a hydrothermal method. / Tonokai, Akimasa; Kanda, Takefumi; Yamaguchi, Daisuke; Suzumori, Koichi.
2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010. 2010. p. 1584-1589 5723566.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - PLZT film actuators deposited by a hydrothermal method
AU - Tonokai, Akimasa
AU - Kanda, Takefumi
AU - Yamaguchi, Daisuke
AU - Suzumori, Koichi
PY - 2010
Y1 - 2010
N2 - Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.
AB - Optical actuators are effective for a miniaturization of micro devices because those actuators can be driven by non-contact energy supply. PLZT is a ferroelectric material which has a photostrictive effect. In this study, a PLZT polycrystalline film has been deposited on a titanium substrate by using a hydrothermal method. The characteristics of the PLZT film have been evaluated. PLZT film actuators have been fabricated by depositing ITO transparent electrode on the surface of the PLZT film. Those actuators have been driven by the ultraviolet light. Performance of the photoresponse drive actuators have been evaluated by measuring displacement, electric current and surface temperature.
UR - http://www.scopus.com/inward/record.url?scp=79952918475&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79952918475&partnerID=8YFLogxK
U2 - 10.1109/ROBIO.2010.5723566
DO - 10.1109/ROBIO.2010.5723566
M3 - Conference contribution
AN - SCOPUS:79952918475
SN - 9781424493173
SP - 1584
EP - 1589
BT - 2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
ER -