Piezoresistance properties of silicon carbide ceramics doped with aluminum nitride and nnitrogen

Yasuyuki Okada, Hidetaka Hayashi, Akira Kishimoto

Research output: Contribution to journalArticle

Abstract

Evaluation samples of α-silicon carbide ceramics were first fabricated by glass capsule HIP method using powder mixture of silicon carbide and aluminum nitride with various ratio. The resultant aluminum nitride added silicon carbide ceramics were doped with nitrogen by changing the post-HIP nitrogen gas pressure. The lattice parameter increased with the amount of adding aluminum nitride indicating that the incorporated aluminum substituted smaller silicon atoms. After post-HIP treatment, lattice parameter then decreased with nitrogen gas pressure. The piezoresistive coefficient increased with the addition of aluminum nitride, it further increased with the nitrogen doping pressure.

Original languageEnglish
Pages (from-to)876-879
Number of pages4
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume53
Issue number11
DOIs
Publication statusPublished - Nov 2006

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Keywords

  • Acceptor
  • Co-doping
  • Donor
  • HIP
  • Piezoresistance
  • Silicon carbide

ASJC Scopus subject areas

  • Mechanical Engineering
  • Metals and Alloys

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