Photovoltaic characteristics of boron-doped hydrogenated amorphous carbon on n-Si substrate prepared by r.f. plasma-enhanced CVD using trimethylboron

Yasuhiko Hayashi, S. Ishikawa, T. Soga, M. Umeno, T. Jimbo

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

An attempt has been made on the device fabrication with boron-doped hydrogenated amorphous carbon (a-C:H) thin film deposited on n-type Si (1 0 0) by r.f. plasma-enhanced CVD. In order to identify the optimal doping condition, the various CH4 partial pressure has been examined. a-C:H/n-Si heterojunction solar cells with a conversion efficiency as high as 0.04% have been fabricated. The spectral response of cell photocurrents in the short wavelength region below 700 nm is determined to be due to the optical absorption of the boron-doped a-C:H film. The photovoltaic properties of the a-C:H based heterojunction solar cell structures are discussed with the dark and illuminated J - V as well as optical properties of boron-doped a-C:H film.

Original languageEnglish
Pages (from-to)687-690
Number of pages4
JournalDiamond and Related Materials
Volume12
Issue number3-7
DOIs
Publication statusPublished - Mar 2003
Externally publishedYes

Fingerprint

Boron
Amorphous carbon
Plasma enhanced chemical vapor deposition
boron
vapor deposition
Heterojunctions
heterojunctions
carbon
Solar cells
Substrates
solar cells
Photocurrents
spectral sensitivity
Partial pressure
Light absorption
Conversion efficiency
partial pressure
photocurrents
optical absorption
Optical properties

Keywords

  • Boron dope
  • Diamond-like carbon
  • Photovoltaic characteristics
  • R.f. plasma-enhanced CVD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Photovoltaic characteristics of boron-doped hydrogenated amorphous carbon on n-Si substrate prepared by r.f. plasma-enhanced CVD using trimethylboron. / Hayashi, Yasuhiko; Ishikawa, S.; Soga, T.; Umeno, M.; Jimbo, T.

In: Diamond and Related Materials, Vol. 12, No. 3-7, 03.2003, p. 687-690.

Research output: Contribution to journalArticle

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