Photopolymerization and metalization for fabricating functional devices and metamaterials

Satoshi Kawata, Takuo Tanaka, Nobuyuki Takeyasu, Sana Nakanishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two-photon-induced photopolymerization is useful for fabricating 3D micro/nano-structures with the resolution of the sub-diffraction limit. By using this method, photonic crystal was created with pre-compensation of shrinkage of photopolymer. On the contrary, the shrinkage was utilized to reduce the structure size. A micro-lens array was used to produce a mass of structures in parallel. Furthermore, metallization of the 3D polymer templates was conducted by electroless metal plating. These fabrication techniques are applicable to functional micro/nano devices.

Original languageEnglish
Title of host publicationNanomanufacturing
Pages14-25
Number of pages12
Publication statusPublished - Dec 1 2006
Externally publishedYes
Event2006 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 17 2006Apr 21 2006

Publication series

NameMaterials Research Society Symposium Proceedings
Volume921
ISSN (Print)0272-9172

Other

Other2006 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/17/064/21/06

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Kawata, S., Tanaka, T., Takeyasu, N., & Nakanishi, S. (2006). Photopolymerization and metalization for fabricating functional devices and metamaterials. In Nanomanufacturing (pp. 14-25). (Materials Research Society Symposium Proceedings; Vol. 921).