Phosphorus diffusion from doped polysilicon through ultra-thin SiO2 films into Si substrates

Yumiko Tsubo, Yukio Komatsu, Kazumasa Saito, Satoru Matsumoto, Yoshiyuki Sato, Ikunao Yamamoto, Yoshifumi Yamashita

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy