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Phosphorus diffusion from doped polysilicon through ultra-thin SiO2 films into Si substrates
Yumiko Tsubo, Yukio Komatsu, Kazumasa Saito, Satoru Matsumoto, Yoshiyuki Sato, Ikunao Yamamoto, Yoshifumi Yamashita
Research output: Contribution to journal › Article › peer-review
3
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(Scopus)