TY - GEN
T1 - Petri net solver for semiconductor manufacturing plan
AU - Maeno, Ryota
AU - Konishi, Masami
AU - Imai, Jun
AU - Nishi, Tatsushi
PY - 2007
Y1 - 2007
N2 - Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.
AB - Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=39049136025&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=39049136025&partnerID=8YFLogxK
U2 - 10.1109/ICICIC.2007.451
DO - 10.1109/ICICIC.2007.451
M3 - Conference contribution
AN - SCOPUS:39049136025
SN - 0769528821
SN - 9780769528823
T3 - Second International Conference on Innovative Computing, Information and Control, ICICIC 2007
BT - Second International Conference on Innovative Computing, Information and Control, ICICIC 2007
PB - IEEE Computer Society
T2 - 2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007
Y2 - 5 September 2007 through 7 September 2007
ER -