Petri net solver for semiconductor manufacturing plan

Ryota Maeno; Masami Konishi; Jun Imai; Tatsushi Nishi

doi:10.1109/ICICIC.2007.451

Petri net solver for semiconductor manufacturing plan

Ryota Maeno, Masami Konishi, Jun Imai, Tatsushi Nishi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.

Original language	English
Title of host publication	Second International Conference on Innovative Computing, Information and Control, ICICIC 2007
DOIs	https://doi.org/10.1109/ICICIC.2007.451
Publication status	Published - 2008
Event	2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007 - Kumamoto, Japan Duration: Sep 5 2007 → Sep 7 2007

Other

Other	2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007
Country	Japan
City	Kumamoto
Period	9/5/07 → 9/7/07

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ASJC Scopus subject areas

Computer Science(all)
Mechanical Engineering

Cite this

Maeno, R., Konishi, M., Imai, J., & Nishi, T. (2008). Petri net solver for semiconductor manufacturing plan. In Second International Conference on Innovative Computing, Information and Control, ICICIC 2007 [4427962] https://doi.org/10.1109/ICICIC.2007.451

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doi = "10.1109/ICICIC.2007.451",

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AU - Nishi, Tatsushi

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AB - Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.

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BT - Second International Conference on Innovative Computing, Information and Control, ICICIC 2007

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Access to Document

10.1109/ICICIC.2007.451