Abstract
Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.
| Original language | English |
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| Title of host publication | Second International Conference on Innovative Computing, Information and Control, ICICIC 2007 |
| Publisher | IEEE Computer Society |
| ISBN (Print) | 0769528821, 9780769528823 |
| DOIs | |
| Publication status | Published - Jan 1 2007 |
| Event | 2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007 - Kumamoto, Japan Duration: Sep 5 2007 → Sep 7 2007 |
Publication series
| Name | Second International Conference on Innovative Computing, Information and Control, ICICIC 2007 |
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Other
| Other | 2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007 |
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| Country | Japan |
| City | Kumamoto |
| Period | 9/5/07 → 9/7/07 |
ASJC Scopus subject areas
- Computer Science(all)
- Mechanical Engineering
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Cite this
Maeno, R., Konishi, M., Imai, J., & Nishi, T. (2007). Petri net solver for semiconductor manufacturing plan. In Second International Conference on Innovative Computing, Information and Control, ICICIC 2007 [4427962] (Second International Conference on Innovative Computing, Information and Control, ICICIC 2007). IEEE Computer Society. https://doi.org/10.1109/ICICIC.2007.451