Petri net solver for semiconductor manufacturing plan

Ryota Maeno, Masami Konishi, Jun Imai, Tatsushi Nishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Petri net model is a widely used versatile tool which can represent a discrete event system such as mechanical system, communication system, and production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel, synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing. Numerical results showed the practicability of the proposed method.

Original languageEnglish
Title of host publicationSecond International Conference on Innovative Computing, Information and Control, ICICIC 2007
DOIs
Publication statusPublished - 2008
Event2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007 - Kumamoto, Japan
Duration: Sep 5 2007Sep 7 2007

Other

Other2nd International Conference on Innovative Computing, Information and Control, ICICIC 2007
CountryJapan
CityKumamoto
Period9/5/079/7/07

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ASJC Scopus subject areas

  • Computer Science(all)
  • Mechanical Engineering

Cite this

Maeno, R., Konishi, M., Imai, J., & Nishi, T. (2008). Petri net solver for semiconductor manufacturing plan. In Second International Conference on Innovative Computing, Information and Control, ICICIC 2007 [4427962] https://doi.org/10.1109/ICICIC.2007.451