Petri net solver for semiconductor manufacturing plan

Ryota Maeno, Masami Konishi, Jun Imai

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Petri net model is a widely used versatile tool which can represent a discrete event system such as a mechanical system, a communication system, and a production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel and synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. However when the size of the targeted model becomes large, the calculation time to solve the optimization problem is remarkably increased. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing is presented. Numerical results showed the practicability of the proposed method.

Original languageEnglish
Pages (from-to)3193-3206
Number of pages14
JournalInternational Journal of Innovative Computing, Information and Control
Volume4
Issue number12
Publication statusPublished - Dec 2008

Fingerprint

Semiconductor Manufacturing
Petri nets
Petri Nets
Semiconductor materials
Discrete Event Systems
Discrete event simulation
Production Systems
Model
Mechanical Systems
Communication Systems
Communication systems
Optimization Problem
Decomposition
Decompose
Numerical Results

Keywords

  • Optimization
  • Petri net model
  • Production planning
  • Route planning
  • Semiconductor manufacturing

ASJC Scopus subject areas

  • Computational Theory and Mathematics
  • Information Systems
  • Software
  • Theoretical Computer Science

Cite this

Petri net solver for semiconductor manufacturing plan. / Maeno, Ryota; Konishi, Masami; Imai, Jun.

In: International Journal of Innovative Computing, Information and Control, Vol. 4, No. 12, 12.2008, p. 3193-3206.

Research output: Contribution to journalArticle

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