Petri net decomposition approach to deadlock-free scheduling for dual-armed cluster tools

Izuru Matsumoto, Tatsushi Nishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Semiconductor cluster tools are used to process a variety of silicon wafers for the fabrication of microelectronic components. The cluster tool system consists of several loadlock modules, processing devices, and material handling armed robots for transferring wafers between them. In order to improve total throughput of cluster tools, a deadlock-free scheduling is highly required for various types of wafer flow patterns or various equipment configurations. In this paper, we propose a Petri net decomposition approach to the optimization of scheduling of dual-armed cluster tools for semiconductor manufacturing. A timed Petri net model is introduced to represent scheduling problems for dual-armed cluster tools. In order to obtain a deadlock-free schedule, we develop a deadlock avoidance control policy that restricts the marking to prevent unmarked siphons. The developed control policy is combined with the Petri net decomposition approach to generate a feasible solution. Computational results show the effectiveness of the proposed method combined with deadlock avoidance policy.

Original languageEnglish
Title of host publication2012 IEEE International Conference on Automation Science and Engineering
Subtitle of host publicationGreen Automation Toward a Sustainable Society, CASE 2012
Pages194-199
Number of pages6
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012 - Seoul, Korea, Republic of
Duration: Aug 20 2012Aug 24 2012

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Conference

Conference2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012
CountryKorea, Republic of
CitySeoul
Period8/20/128/24/12

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Matsumoto, I., & Nishi, T. (2012). Petri net decomposition approach to deadlock-free scheduling for dual-armed cluster tools. In 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012 (pp. 194-199). [6386362] (IEEE International Conference on Automation Science and Engineering). https://doi.org/10.1109/CoASE.2012.6386362