Performance of micro ultrasonic motor using one cubic millimeter stator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


We present the performance of a micro ultrasonic motor using a stator with a volume of approximately one cubic millimeter, which is one of the smallest ultrasonic motors. The stator consists of a metallic cube with through-hole, a rotor shaft is inserted to the hole, and piezoelectric elements adhered to its four sides. When voltages are applied to the piezoelectric elements, the stator generates travelling wave and spins the rotor. In this paper, we examine how the clearance and preload between the stator and rotor relate to the motor performance. The motor torque and rotational speed are measured by changing the clearance and preload.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Number of pages4
ISBN (Electronic)9781479970490
Publication statusPublished - Oct 20 2014
Externally publishedYes
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: Sept 3 2014Sept 6 2014

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Other2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/TerritoryUnited States


  • elliptical motion
  • high-speed microscope
  • piezoelectric actuator
  • ultrasonic motor

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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