Performance of hydrothermal PZT film on high intensity operation

Minoru Kuribayashi Kurosawa, Hidehiko Yasui, Takefumi Kanda, Toshiro Higuchi

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

Abstract

A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.

Original languageEnglish
Pages56-61
Number of pages6
Publication statusPublished - 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Conference

Conference13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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