Performance of hydrothermal PZT film on high intensity operation

Minoru Kuribayashi Kurosawa, Hidehiko Yasui, Takefumi Kanda, Toshiro Higuchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.

Original languageEnglish
Title of host publication13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
Pages56-61
Number of pages6
Publication statusPublished - 2000
Externally publishedYes

Fingerprint

Transducers
Vibrations (mechanical)
Frequency response
Thin films

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Kurosawa, M. K., Yasui, H., Kanda, T., & Higuchi, T. (2000). Performance of hydrothermal PZT film on high intensity operation. In 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) (pp. 56-61)

Performance of hydrothermal PZT film on high intensity operation. / Kurosawa, Minoru Kuribayashi; Yasui, Hidehiko; Kanda, Takefumi; Higuchi, Toshiro.

13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000). 2000. p. 56-61.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kurosawa, MK, Yasui, H, Kanda, T & Higuchi, T 2000, Performance of hydrothermal PZT film on high intensity operation. in 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000). pp. 56-61.
Kurosawa MK, Yasui H, Kanda T, Higuchi T. Performance of hydrothermal PZT film on high intensity operation. In 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000). 2000. p. 56-61
Kurosawa, Minoru Kuribayashi ; Yasui, Hidehiko ; Kanda, Takefumi ; Higuchi, Toshiro. / Performance of hydrothermal PZT film on high intensity operation. 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000). 2000. pp. 56-61
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