Performance of hydrothermal PZT film on high intensity operation

Takefumi Kanda, Minoru Kuribayashi Kurosawa, Hidehiko Yasui, Toshiro Higuchi

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

The deposition processes of PZT thin films have been described in many reports, yet there have been no descriptions of the performance of PZT films at high intensity operation. Hydrothermally-deposited PZT film transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT film expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using films formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the film was 38 μm and the driving voltage was 145 Vp-p. This velocity value was much larger than bulk PZT materials for high power applications.

Original languageEnglish
Pages (from-to)16-21
Number of pages6
JournalSensors and Actuators, A: Physical
Volume89
Issue number1-2
DOIs
Publication statusPublished - Mar 20 2001
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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