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Performance Improvement of HfS2 Transistors by Atomic Layer Deposition of HfO2
Toru Kanazawa, Tomohiro Amemiya, Vikrant Upadhyaya, Atsushi Ishikawa, Kenji Tsuruta, Takuo Tanaka, Yasuyuki Miyamoto
Research output: Contribution to journal › Article › peer-review
12
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(Scopus)