Performance improvement of a high-temperature stress sensor incorporated with flat pores through a solid state foaming method

Yuuki Takamuro, Takasi Teranisi, Hidetaka Hayashi, Akira Kishimoto

Research output: Contribution to journalArticle

Abstract

Aiming for an application to the high temperature pressure sensor, semiconductive ceramics foam incorporated with a narrow slit has been fabricated by our innovated superplastically foaming method. We investigated the pressure dependence of resistance on the zinc oxide based foaming body, by changing the fabrication process and composition. The resistance of the sample decreased with an increase in pressure both at room and high temperatures. The performances of this type of sensor such as sensitivity and linearity have been improved by doping ambivalent atoms (Ag and Li) into the matrix.

Original languageEnglish
Pages (from-to)68-72
Number of pages5
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume64
Issue number2
Publication statusPublished - Feb 1 2017

Fingerprint

Ceramic foams
Zinc Oxide
Sensors
Pressure sensors
Temperature sensors
Zinc oxide
Doping (additives)
Fabrication
Atoms
Temperature
Chemical analysis

Keywords

  • Doping
  • Pore
  • Pressure sensor
  • Superplasticity

ASJC Scopus subject areas

  • Mechanical Engineering
  • Metals and Alloys
  • Industrial and Manufacturing Engineering
  • Materials Chemistry

Cite this

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AU - Kishimoto, Akira

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AB - Aiming for an application to the high temperature pressure sensor, semiconductive ceramics foam incorporated with a narrow slit has been fabricated by our innovated superplastically foaming method. We investigated the pressure dependence of resistance on the zinc oxide based foaming body, by changing the fabrication process and composition. The resistance of the sample decreased with an increase in pressure both at room and high temperatures. The performances of this type of sensor such as sensitivity and linearity have been improved by doping ambivalent atoms (Ag and Li) into the matrix.

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