Abstract
In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.
| Original language | English |
|---|---|
| Title of host publication | Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society |
| Pages | 3958-3963 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
| Event | 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 - Vienna, Austria Duration: Nov 10 2013 → Nov 14 2013 |
Other
| Other | 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 |
|---|---|
| Country | Austria |
| City | Vienna |
| Period | 11/10/13 → 11/14/13 |
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Keywords
- absolute displacement sensor
- high frequency dynamics
- mass damper
- modal analysis
- shaking test
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
Cite this
Performance evaluation and analysis of a vertical type absolute displacement sensor. / Uemoto, Takaaki; Nakamura, Yukinori; Wakui, Shinji.
Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3958-3963 6699768.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Performance evaluation and analysis of a vertical type absolute displacement sensor
AU - Uemoto, Takaaki
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2013
Y1 - 2013
N2 - In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.
AB - In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.
KW - absolute displacement sensor
KW - high frequency dynamics
KW - mass damper
KW - modal analysis
KW - shaking test
UR - http://www.scopus.com/inward/record.url?scp=84893633747&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84893633747&partnerID=8YFLogxK
U2 - 10.1109/IECON.2013.6699768
DO - 10.1109/IECON.2013.6699768
M3 - Conference contribution
SN - 9781479902248
SP - 3958
EP - 3963
BT - Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society
ER -