Performance evaluation and analysis of a vertical type absolute displacement sensor

Takaaki Uemoto, Yukinori Nakamura, Shinji Wakui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.

Original languageEnglish
Title of host publicationProceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society
Pages3958-3963
Number of pages6
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013 - Vienna, Austria
Duration: Nov 10 2013Nov 14 2013

Other

Other39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013
CountryAustria
CityVienna
Period11/10/1311/14/13

Fingerprint

Sensors
Feedback
Vibration control
Modal analysis
Pendulums
Accelerometers
Pneumatics
Feedback control
Damping
Semiconductor materials
Detectors
Bandwidth

Keywords

  • absolute displacement sensor
  • high frequency dynamics
  • mass damper
  • modal analysis
  • shaking test

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Uemoto, T., Nakamura, Y., & Wakui, S. (2013). Performance evaluation and analysis of a vertical type absolute displacement sensor. In Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society (pp. 3958-3963). [6699768] https://doi.org/10.1109/IECON.2013.6699768

Performance evaluation and analysis of a vertical type absolute displacement sensor. / Uemoto, Takaaki; Nakamura, Yukinori; Wakui, Shinji.

Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3958-3963 6699768.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Uemoto, T, Nakamura, Y & Wakui, S 2013, Performance evaluation and analysis of a vertical type absolute displacement sensor. in Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society., 6699768, pp. 3958-3963, 39th Annual Conference of the IEEE Industrial Electronics Society, IECON 2013, Vienna, Austria, 11/10/13. https://doi.org/10.1109/IECON.2013.6699768
Uemoto T, Nakamura Y, Wakui S. Performance evaluation and analysis of a vertical type absolute displacement sensor. In Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. p. 3958-3963. 6699768 https://doi.org/10.1109/IECON.2013.6699768
Uemoto, Takaaki ; Nakamura, Yukinori ; Wakui, Shinji. / Performance evaluation and analysis of a vertical type absolute displacement sensor. Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. 2013. pp. 3958-3963
@inproceedings{ca1f6fb2b95a44ca97f9a3ad76fe9a6d,
title = "Performance evaluation and analysis of a vertical type absolute displacement sensor",
abstract = "In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.",
keywords = "absolute displacement sensor, high frequency dynamics, mass damper, modal analysis, shaking test",
author = "Takaaki Uemoto and Yukinori Nakamura and Shinji Wakui",
year = "2013",
doi = "10.1109/IECON.2013.6699768",
language = "English",
isbn = "9781479902248",
pages = "3958--3963",
booktitle = "Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society",

}

TY - GEN

T1 - Performance evaluation and analysis of a vertical type absolute displacement sensor

AU - Uemoto, Takaaki

AU - Nakamura, Yukinori

AU - Wakui, Shinji

PY - 2013

Y1 - 2013

N2 - In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.

AB - In the field of vibration control, accelerometers are widely used as feedback sensors. On the other hand, it is desirable to use a velocity sensor or a displacement sensor without integral operators. Effects of damping and a skyhook spring are obtained by velocity and displacement feedback, respectively. Due to this, an absolute displacement sensor has proposed as a feedback sensor for semiconductor exposure apparatuses. The proposed displacement sensor has the same mechanical structured having a detector and pendulum as a commercial velocity sensor. In authors' previous works, the proposed sensor has been successfully applied as feedback and feedforward sensors. However, detection bandwidth is limited due to mechanical resonances called high frequency dynamics. In this paper, we consider the suppression of high frequency resonance. At first, the modal analysis of the vertical type displacement sensor is conducted in order to investigate vibration modes. Then, the shaking test is also conducted by using the pneumatic active anti-vibration apparatus with the proposed sensor. Finally, we evaluate the performance of the apparatus under the condition that the vertical type displacement sensor is used for feedback control.

KW - absolute displacement sensor

KW - high frequency dynamics

KW - mass damper

KW - modal analysis

KW - shaking test

UR - http://www.scopus.com/inward/record.url?scp=84893633747&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893633747&partnerID=8YFLogxK

U2 - 10.1109/IECON.2013.6699768

DO - 10.1109/IECON.2013.6699768

M3 - Conference contribution

SN - 9781479902248

SP - 3958

EP - 3963

BT - Proceedings, IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

ER -