Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Akira Kishimoto, Naosuke Matsuzaki, Tetsuichi Kudo

Research output: Contribution to journalArticle

Abstract

Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

Original languageEnglish
Pages (from-to)143-144
Number of pages2
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume101
Issue number1169
Publication statusPublished - Jan 1993
Externally publishedYes

Fingerprint

Irradiation
Oxygen
Thin films
acids
Molecules
irradiation
Acids
oxygen
thin films
molecules
inorganic materials
densification
Densification
Decomposition
decomposition
Water
products
water

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids. / Kishimoto, Akira; Matsuzaki, Naosuke; Kudo, Tetsuichi.

In: Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, Vol. 101, No. 1169, 01.1993, p. 143-144.

Research output: Contribution to journalArticle

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