Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Akira Kishimoto, Naosuke Matsuzaki, Tetsuichi Kudo

Research output: Contribution to journalArticlepeer-review

Abstract

Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

Original languageEnglish
Pages (from-to)143-144
Number of pages2
JournalNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
Volume101
Issue number1169
DOIs
Publication statusPublished - 1993

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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