Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.
|Number of pages||2|
|Journal||Journal of the Ceramic Society of Japan. International ed.|
|Publication status||Published - Jan 1993|
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