Oxygen molecules stably caged in a UV irradiated thin film from peroxo polytungstic acids

Akira Kishimoto, Naosuke Matsuzaki, Tetsuichi Kudo

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Peroxo polytungstic acids are promising inorganic resist materials which become insoluble in water by UV irradiation. After UV irradiation, part of oxygen molecules, decomposition product of the peroxo groups, was stably caged in the amorphous network. This mechanism is discussed in connection with the densification of thin films during UV irradiation.

Original languageEnglish
Pages (from-to)137-138
Number of pages2
JournalJournal of the Ceramic Society of Japan. International ed.
Issue number1
Publication statusPublished - Jan 1993
Externally publishedYes


ASJC Scopus subject areas

  • Engineering(all)

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