Optical waveguiding layers of LiNb03 on LiTaO, substrates were obtained by rf sputtering. The LiNb03 layer was determined to be a single crystal over the whole deposited region by reflection electron diffraction patterns. Propagation of TEo and TMo modes were observed for an as-sputtered film, and TEo, TEI, TMo modes for a film annealed at 1 loOoc for 10 minutes. The layer's effective thickness and refractive index (no) of 2500 A and 2.318 at 6328 A respectively, were calculated from the coupling conditions. The losses were 16 dB/cm for the as-sputtered film and 8 dB/cm for the annealed film.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics