Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enchanced CVD

Y. Hayashi, K. M. Krishna, H. Ebisu, T. Soga, M. Umeno, T. Jimbo

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

Nitrogen doped hydrogenated amorphous diamond-like carbon thin films have been synthesized by radio frequency (rf) plasma-enhanced chemical vapor deposition (PECVD) using CH4 as the source of carbon and with different N2 flow rates (N2/CH4 gas ratios between 0 and 3), at 300 K. The dependence of optical and structural properties/modifications on the nitrogen incorporation was investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), UV-visible spectroscopy and electron spin resonance (ESR) measurements. It was found that the configuration of nitrogen atoms incorporated into an amorphous carbon network gradually changed from nitrogen atoms surrounded by three (σ bonding) to two (Π bonding) neighbor carbons with increasing nitrogen flow rate. The Tauc optical gap was reduced from 2.6 to 2.0 eV with increasing nitrogen flow rate. The ESR spin density and the peak-to-peak linewidth increased drastically with increasing nitrogen flow rate. Significant structural modifications were observed above a gas ratio N2/CH4 of 1.

Original languageEnglish
Pages (from-to)1002-1006
Number of pages5
JournalDiamond and Related Materials
Volume10
Issue number3-7
DOIs
Publication statusPublished - Mar 1 2001
Externally publishedYes

Keywords

  • Diamond-like carbon
  • Nitrogen
  • Spectroscopy
  • n-type doping

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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