Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enchanced CVD

Yasuhiko Hayashi, K. M. Krishna, H. Ebisu, T. Soga, M. Umeno, T. Jimbo

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

Nitrogen doped hydrogenated amorphous diamond-like carbon thin films have been synthesized by radio frequency (rf) plasma-enhanced chemical vapor deposition (PECVD) using CH4 as the source of carbon and with different N2 flow rates (N2/CH4 gas ratios between 0 and 3), at 300 K. The dependence of optical and structural properties/modifications on the nitrogen incorporation was investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), UV-visible spectroscopy and electron spin resonance (ESR) measurements. It was found that the configuration of nitrogen atoms incorporated into an amorphous carbon network gradually changed from nitrogen atoms surrounded by three (σ bonding) to two (Π bonding) neighbor carbons with increasing nitrogen flow rate. The Tauc optical gap was reduced from 2.6 to 2.0 eV with increasing nitrogen flow rate. The ESR spin density and the peak-to-peak linewidth increased drastically with increasing nitrogen flow rate. Significant structural modifications were observed above a gas ratio N2/CH4 of 1.

Original languageEnglish
Pages (from-to)1002-1006
Number of pages5
JournalDiamond and Related Materials
Volume10
Issue number3-7
DOIs
Publication statusPublished - Mar 2001
Externally publishedYes

Fingerprint

Plasma CVD
Carbon films
Amorphous carbon
Amorphous films
Structural properties
radio frequencies
Nitrogen
Optical properties
vapor deposition
optical properties
nitrogen
flow velocity
carbon
Flow rate
nitrogen atoms
electron paramagnetic resonance
Paramagnetic resonance
Carbon
Gases
gases

Keywords

  • Diamond-like carbon
  • n-type doping
  • Nitrogen
  • Spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enchanced CVD. / Hayashi, Yasuhiko; Krishna, K. M.; Ebisu, H.; Soga, T.; Umeno, M.; Jimbo, T.

In: Diamond and Related Materials, Vol. 10, No. 3-7, 03.2001, p. 1002-1006.

Research output: Contribution to journalArticle

Hayashi, Yasuhiko ; Krishna, K. M. ; Ebisu, H. ; Soga, T. ; Umeno, M. ; Jimbo, T. / Optical and structural properties of nitrogen doped amorphous carbon films grown by rf plasma-enchanced CVD. In: Diamond and Related Materials. 2001 ; Vol. 10, No. 3-7. pp. 1002-1006.
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AU - Umeno, M.

AU - Jimbo, T.

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N2 - Nitrogen doped hydrogenated amorphous diamond-like carbon thin films have been synthesized by radio frequency (rf) plasma-enhanced chemical vapor deposition (PECVD) using CH4 as the source of carbon and with different N2 flow rates (N2/CH4 gas ratios between 0 and 3), at 300 K. The dependence of optical and structural properties/modifications on the nitrogen incorporation was investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), UV-visible spectroscopy and electron spin resonance (ESR) measurements. It was found that the configuration of nitrogen atoms incorporated into an amorphous carbon network gradually changed from nitrogen atoms surrounded by three (σ bonding) to two (Π bonding) neighbor carbons with increasing nitrogen flow rate. The Tauc optical gap was reduced from 2.6 to 2.0 eV with increasing nitrogen flow rate. The ESR spin density and the peak-to-peak linewidth increased drastically with increasing nitrogen flow rate. Significant structural modifications were observed above a gas ratio N2/CH4 of 1.

AB - Nitrogen doped hydrogenated amorphous diamond-like carbon thin films have been synthesized by radio frequency (rf) plasma-enhanced chemical vapor deposition (PECVD) using CH4 as the source of carbon and with different N2 flow rates (N2/CH4 gas ratios between 0 and 3), at 300 K. The dependence of optical and structural properties/modifications on the nitrogen incorporation was investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), UV-visible spectroscopy and electron spin resonance (ESR) measurements. It was found that the configuration of nitrogen atoms incorporated into an amorphous carbon network gradually changed from nitrogen atoms surrounded by three (σ bonding) to two (Π bonding) neighbor carbons with increasing nitrogen flow rate. The Tauc optical gap was reduced from 2.6 to 2.0 eV with increasing nitrogen flow rate. The ESR spin density and the peak-to-peak linewidth increased drastically with increasing nitrogen flow rate. Significant structural modifications were observed above a gas ratio N2/CH4 of 1.

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