Observation of plasma behavior in micro-machining of ceramics by harmonics of Nd: YAG laser

Norihiro Hayashi, Yasuhiro Okamoto, Yoshiyuki Uno, Tomokazu Sakagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Precision micro-machining without crack and with narrow heat affected zone is required in order to use high-performance material. For this purpose, it is expected that higher harmonics of Nd: YAG laser could perform precision micro-machining by its high photon energy. However, even using harmonics of Nd: YAG laser, heat affected zone is inevitable due to the plasma generation. In order to reduce the influence of plasma, it is important to understand the generation mechanism of plasma. Therefore, the laser induced plasma was observed by high-speed shutter camera, and the influence of laser wavelength on machining characteristics was investigated.

Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Publication statusPublished - 2009
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: Dec 2 2009Dec 4 2009

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period12/2/0912/4/09

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Keywords

  • Harmonics of Nd: YAG laser
  • High-speed observation
  • Micro-boring
  • Plasma
  • Removal depth

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Hayashi, N., Okamoto, Y., Uno, Y., & Sakagawa, T. (2009). Observation of plasma behavior in micro-machining of ceramics by harmonics of Nd: YAG laser. In Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009