TY - JOUR
T1 - Nucleation site in CVD graphene growth investigated by radiation-mode optical microscopy
AU - Taira, Takanobu
AU - Obata, Seiji
AU - Saiki, Koichiro
N1 - Publisher Copyright:
© 2017 The Japan Society of Applied Physics.
PY - 2017/5
Y1 - 2017/5
N2 - We investigate the graphene nucleation site in real space using radiation-mode optical microscopy (Rad-OM), which we have developed for the real-Time observation of the graphene growth in chemical vapor deposition (CVD) conditions. We found the bright spot in the Rad-OM image worked as a nucleation site through continuous observation of a Cu substrate from pretreatment to graphene growth. The bright spot, considered as a C impurity, was effectively removed by Ar bombardment, which significantly reduced the nucleation density. The present result directly elucidates the role of C impurities and provides a means to grow single-crystalline and large-Area graphene via CVD.
AB - We investigate the graphene nucleation site in real space using radiation-mode optical microscopy (Rad-OM), which we have developed for the real-Time observation of the graphene growth in chemical vapor deposition (CVD) conditions. We found the bright spot in the Rad-OM image worked as a nucleation site through continuous observation of a Cu substrate from pretreatment to graphene growth. The bright spot, considered as a C impurity, was effectively removed by Ar bombardment, which significantly reduced the nucleation density. The present result directly elucidates the role of C impurities and provides a means to grow single-crystalline and large-Area graphene via CVD.
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U2 - 10.7567/APEX.10.055502
DO - 10.7567/APEX.10.055502
M3 - Article
AN - SCOPUS:85018978686
SN - 1882-0778
VL - 10
JO - Applied Physics Express
JF - Applied Physics Express
IS - 5
M1 - 055502
ER -