Nucleation site in CVD graphene growth investigated by radiation-mode optical microscopy

Takanobu Taira, Seiji Obata, Koichiro Saiki

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3 Citations (Scopus)

Abstract

We investigate the graphene nucleation site in real space using radiation-mode optical microscopy (Rad-OM), which we have developed for the real-Time observation of the graphene growth in chemical vapor deposition (CVD) conditions. We found the bright spot in the Rad-OM image worked as a nucleation site through continuous observation of a Cu substrate from pretreatment to graphene growth. The bright spot, considered as a C impurity, was effectively removed by Ar bombardment, which significantly reduced the nucleation density. The present result directly elucidates the role of C impurities and provides a means to grow single-crystalline and large-Area graphene via CVD.

Original languageEnglish
Article number055502
JournalApplied Physics Express
Volume10
Issue number5
DOIs
Publication statusPublished - May 2017
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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