We have developed the new analytical system which consists of electron cyclotron resonance ion source (ECRIS) and heavy ion linear accelerator. ECRIS-AMS (Accelerator Mass Spectrometry using Electron Cyclotron Resonance Ion Source) has several advantages described below. 1) The production of positive ions in the ECRIS is not influenced by ionization selectivity. 2) We can analyze many trace elements simultaneously in the material with very low background. 3) We can minimize the spectroscopic interference by using the high temperature ECR plasma. Using this system, we have measured elemental compositions in rock reference samples (JB-2). From our experimental results, it is considered that the further development and establishment of this method will play an important role in the trace element analysis. For this application, we just need small heavy ion linear accelerator which has acceleration energy of ∼ 1MeV/u. In this contribution, we will present the procedure of analysis in detail and several experimental results for trace element analysis in the materials.