Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates

Isamu Miyamoto, Yasuhiro Okamoto, Assi Hansen, Tiina Amberla, Jorma Vihinen, Jarno Kangastupa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Using ps laser pulses with high pulse repetition rates, novel fusion welding technique of Si/glass material combination has been developed, which can overcome the most problems encountered in existing anodic bonding, providing excellent joint strength and throughput. Our technique allows welding of Si/glass without pre- and post-heating at high spatial resolution down to 10μm at maximum joint strength of 80MPa, and is shown to provide much better performance than ns laser pulses based on the analysis of laser-matter interaction. No defects are found by cutting using standard blade dicer and accelerated life test (500 cycles: -40C∼85C) of the laser-welded joint, demonstrating the welding technique has excellent performance for applications to wafer-level packaging and hermetic sealing.

Original languageEnglish
Title of host publicationICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics
Pages784-793
Number of pages10
Publication statusPublished - 2012
Event31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States
Duration: Sep 23 2012Sep 27 2012

Other

Other31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
CountryUnited States
CityAnaheim, CA
Period9/23/129/27/12

Fingerprint

Pulse repetition rate
Ultrashort pulses
Welding
Fusion reactions
Glass
Laser pulses
Heating
Lasers
Packaging
Welds
Throughput
Defects

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Miyamoto, I., Okamoto, Y., Hansen, A., Amberla, T., Vihinen, J., & Kangastupa, J. (2012). Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics (pp. 784-793)

Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates. / Miyamoto, Isamu; Okamoto, Yasuhiro; Hansen, Assi; Amberla, Tiina; Vihinen, Jorma; Kangastupa, Jarno.

ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 784-793.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Miyamoto, I, Okamoto, Y, Hansen, A, Amberla, T, Vihinen, J & Kangastupa, J 2012, Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates. in ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. pp. 784-793, 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012, Anaheim, CA, United States, 9/23/12.
Miyamoto I, Okamoto Y, Hansen A, Amberla T, Vihinen J, Kangastupa J. Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 784-793
Miyamoto, Isamu ; Okamoto, Yasuhiro ; Hansen, Assi ; Amberla, Tiina ; Vihinen, Jorma ; Kangastupa, Jarno. / Novel fusion welding technology of Si/glass using ultrashort laser pulses with high pulse repetition rates. ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. pp. 784-793
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