Nondestructive inspection of SiGe films using laser terahertz emission microscopy

Akihiro Nakamura, Ken Omura, Kenji Sakai, Toshihiko Kiwa, Keiji Tsukada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Nondestructive inspection of SiGe films using laser terahertz emission microscopy'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds