Nondestructive inspection of SiGe films using laser terahertz emission microscopy

Akihiro Nakamura, Ken Omura, Kenji Sakai, Toshihiko Kiwa, Keiji Tsukada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser terahertz emission microscopy was applied to investigate the SiGe film on the Si substrate. In this study, as the initial experiment to apply LTEM to non-destructive evaluation of the strained SiGe films, the THz emission properties of the strained-SiGe were measured.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
DOIs
Publication statusPublished - 2013
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

Fingerprint

inspection
Microscopic examination
Inspection
microscopy
Lasers
lasers
evaluation
Substrates
Experiments

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Nakamura, A., Omura, K., Sakai, K., Kiwa, T., & Tsukada, K. (2013). Nondestructive inspection of SiGe films using laser terahertz emission microscopy. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest [6600524] https://doi.org/10.1109/CLEOPR.2013.6600524

Nondestructive inspection of SiGe films using laser terahertz emission microscopy. / Nakamura, Akihiro; Omura, Ken; Sakai, Kenji; Kiwa, Toshihiko; Tsukada, Keiji.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2013. 6600524.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakamura, A, Omura, K, Sakai, K, Kiwa, T & Tsukada, K 2013, Nondestructive inspection of SiGe films using laser terahertz emission microscopy. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest., 6600524, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600524
Nakamura A, Omura K, Sakai K, Kiwa T, Tsukada K. Nondestructive inspection of SiGe films using laser terahertz emission microscopy. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2013. 6600524 https://doi.org/10.1109/CLEOPR.2013.6600524
Nakamura, Akihiro ; Omura, Ken ; Sakai, Kenji ; Kiwa, Toshihiko ; Tsukada, Keiji. / Nondestructive inspection of SiGe films using laser terahertz emission microscopy. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2013.
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