| Original language | English |
|---|---|
| Pages (from-to) | 135-138 |
| Number of pages | 4 |
| Journal | Shinku |
| Volume | 37 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1994 |
| Externally published | Yes |
Fingerprint
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation. / Tsuji, Hiroshi; Sakai, Shigeki; Okayama, Yoshio; Toyota, Yoshitaka; Gotoh, Yasuhito; Matsuda, Kouji; Tanjyo, Masayasu; Ishikawa, Junzo.
In: Shinku, Vol. 37, No. 3, 1994, p. 135-138.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation
AU - Tsuji, Hiroshi
AU - Sakai, Shigeki
AU - Okayama, Yoshio
AU - Toyota, Yoshitaka
AU - Gotoh, Yasuhito
AU - Matsuda, Kouji
AU - Tanjyo, Masayasu
AU - Ishikawa, Junzo
PY - 1994
Y1 - 1994
UR - http://www.scopus.com/inward/record.url?scp=85008301458&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85008301458&partnerID=8YFLogxK
U2 - 10.3131/jvsj.37.135
DO - 10.3131/jvsj.37.135
M3 - Article
AN - SCOPUS:85008301458
VL - 37
SP - 135
EP - 138
JO - Journal of the Vacuum Society of Japan
JF - Journal of the Vacuum Society of Japan
SN - 1882-2398
IS - 3
ER -