Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation

Hiroshi Tsuji, Shigeki Sakai, Yoshio Okayama, Yoshitaka Toyota, Yasuhito Gotoh, Kouji Matsuda, Masayasu Tanjyo, Junzo Ishikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)135-138
Number of pages4
JournalShinku
Volume37
Issue number3
DOIs
Publication statusPublished - 1994
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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