Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation

Hiroshi Tsuji, Shigeki Sakai, Yoshio Okayama, Yoshitaka Toyota, Yasuhito Gotoh, Kouji Matsuda, Masayasu Tanjyo, Junzo Ishikawa

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)135-138
Number of pages4
JournalShinku
Volume37
Issue number3
DOIs
Publication statusPublished - 1994
Externally publishedYes

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Ion implantation
Current density
Negative ions
Electrodes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation. / Tsuji, Hiroshi; Sakai, Shigeki; Okayama, Yoshio; Toyota, Yoshitaka; Gotoh, Yasuhito; Matsuda, Kouji; Tanjyo, Masayasu; Ishikawa, Junzo.

In: Shinku, Vol. 37, No. 3, 1994, p. 135-138.

Research output: Contribution to journalArticle

Tsuji, H, Sakai, S, Okayama, Y, Toyota, Y, Gotoh, Y, Matsuda, K, Tanjyo, M & Ishikawa, J 1994, 'Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation', Shinku, vol. 37, no. 3, pp. 135-138. https://doi.org/10.3131/jvsj.37.135
Tsuji, Hiroshi ; Sakai, Shigeki ; Okayama, Yoshio ; Toyota, Yoshitaka ; Gotoh, Yasuhito ; Matsuda, Kouji ; Tanjyo, Masayasu ; Ishikawa, Junzo. / Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation. In: Shinku. 1994 ; Vol. 37, No. 3. pp. 135-138.
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