Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation

Hiroshi Tsuji; Shigeki Sakai; Yoshio Okayama; Yoshitaka Toyota; Yasuhito Gotoh; Kouji Matsuda; Masayasu Tanjyo; Junzo Ishikawa

doi:10.3131/jvsj.37.135

Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation

Hiroshi Tsuji, Shigeki Sakai, Yoshio Okayama, Yoshitaka Toyota, Yasuhito Gotoh, Kouji Matsuda, Masayasu Tanjyo, Junzo Ishikawa

Research output: Contribution to journal › Article

1 Citation (Scopus)

Original language	English
Pages (from-to)	135-138
Number of pages	4
Journal	Shinku
Volume	37
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.37.135
Publication status	Published - 1994
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.3131/jvsj.37.135

Cite this

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title = "Negative-Ion Current Density Dependence of the Surface Potential of Insulated Electrode During Negative-Ion Implantation",

author = "Hiroshi Tsuji and Shigeki Sakai and Yoshio Okayama and Yoshitaka Toyota and Yasuhito Gotoh and Kouji Matsuda and Masayasu Tanjyo and Junzo Ishikawa",

year = "1994",

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language = "English",

volume = "37",

pages = "135--138",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "1882-2398",

publisher = "Vacuum Society of Japan",

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AU - Tsuji, Hiroshi

AU - Sakai, Shigeki

AU - Okayama, Yoshio

AU - Toyota, Yoshitaka

AU - Gotoh, Yasuhito

AU - Matsuda, Kouji

AU - Tanjyo, Masayasu

AU - Ishikawa, Junzo

PY - 1994

Y1 - 1994

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U2 - 10.3131/jvsj.37.135

DO - 10.3131/jvsj.37.135

M3 - Article

AN - SCOPUS:85008301458

VL - 37

SP - 135

EP - 138

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

SN - 1882-2398

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ER -