Multilayer formation via spinodal decomposition in TiO2-VO2 epitaxial films on sapphire substrates

Yuka Matsuura, Fumiya Yoshii, Tsubasa Otsuka, Kenji Kadowaki, Masataka Ijiri, Yoshito Takemoto, Kensei Terashima, Takanori Wakita, Takayoshi Yokoya, Yuji Muraoka

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2 Citations (Scopus)

Abstract

We present multilayer formation via spinodal decomposition in rutile TiO2-VO2 (TVO) epitaxial films on sapphire substrates. (001)- and (101)-oriented TVO solid-solution films are grown epitaxially on TiO2/Al2O3 using a pulsed laser deposition technique and annealed inside the spinodal region. X-ray diffraction measurements and scanning transmission electron microscopy (STEM) observations show that the films are phase-separated along the [001] direction and lamellar structures are formed in a parallel or slanted direction to the sapphire substrates depending on the film orientation. The results indicate the multilayer formation via spinodal decomposition in the TVO films. STEM investigations also reveal a relatively high Ti concentration in the decomposed phases, reflecting the influence of lattice deformation on the phase decomposition in the films. Our work shows that spinodal decomposition is a promising approach for the formation of a multilayer structure in TVO films and helps deepen understanding the spinodal decomposition in TVO system.

Original languageEnglish
JournalJournal of the European Ceramic Society
DOIs
Publication statusAccepted/In press - Jan 1 2018

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Keywords

  • Formation
  • Lattice deformation
  • Multilayer
  • Sapphire substrate
  • Spinodal decomposition
  • TiO-VO film

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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