Monolithic pixel detector in a 0.15μm SOI technology

Y. Arai, M. Hazumi, Y. Ikegami, T. Kohriki, O. Tajima, S. Terada, T. Tsuboyama, Y. Unno, H. Ushiroda, H. Ikeda, K. Hara, H. Ishino, T. Kawasaki, E. Martin, G. Varner, H. Tajima, M. Ohno, K. Fukuda, H. Komatsubara, J. IdaH. Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

22 Citations (Scopus)

Abstract

We describe a new pixel detector development project using a 0.15 μm fully-depleted CMOS SOI (Silicon-On-Insulator) technology. Additional processing steps for creating substrate implants and contacts to form sensor and electrode connections were developed for this SOI process. A diode Test Element Group and several test chips have been fabricated and evaluated. The pixel detectors are successfully operated and first images are taken and sensibility to β-rays is confirmed. Back gate effects on the top circuits are observed and discussed.

Original languageEnglish
Title of host publication2006 IEEE Nuclear Science Symposium - Conference Record
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1440-1444
Number of pages5
ISBN (Print)1424405610, 9781424405619
DOIs
Publication statusPublished - Jan 1 2006
Externally publishedYes
Event2006 IEEE Nuclear Science Symposium, Medical Imaging Conference and 15th International Workshop on Room-Temperature Semiconductor X- and Gamma-Ray Detectors, Special Focus Workshops, NSS/MIC/RTSD - San Diego, CA, United States
Duration: Oct 29 2006Nov 4 2006

Publication series

NameIEEE Nuclear Science Symposium Conference Record
Volume3
ISSN (Print)1095-7863

Other

Other2006 IEEE Nuclear Science Symposium, Medical Imaging Conference and 15th International Workshop on Room-Temperature Semiconductor X- and Gamma-Ray Detectors, Special Focus Workshops, NSS/MIC/RTSD
CountryUnited States
CitySan Diego, CA
Period10/29/0611/4/06

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ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Radiology Nuclear Medicine and imaging

Cite this

Arai, Y., Hazumi, M., Ikegami, Y., Kohriki, T., Tajima, O., Terada, S., Tsuboyama, T., Unno, Y., Ushiroda, H., Ikeda, H., Hara, K., Ishino, H., Kawasaki, T., Martin, E., Varner, G., Tajima, H., Ohno, M., Fukuda, K., Komatsubara, H., ... Hayashi, H. (2006). Monolithic pixel detector in a 0.15μm SOI technology. In 2006 IEEE Nuclear Science Symposium - Conference Record (pp. 1440-1444). [4179284] (IEEE Nuclear Science Symposium Conference Record; Vol. 3). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NSSMIC.2006.354171