Fingerprint
Dive into the research topics of 'Molecular dynamics study on dielectric properties of silicon oxynitride: Composition and microstructure dependence'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Molecular dynamics study on dielectric properties of silicon oxynitride: Composition and microstructure dependence
Munemasa Tomita, Kenji Tsuruta
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution