@inproceedings{27f61282a8ef4aa7aaa2415b69638871,
title = "Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source",
abstract = "We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.",
keywords = "EUV source, hydrodynamics, laser produced plasma, modeling, simulation",
author = "Akira Sasaki and Katsunobu Nishihara and Atushi Sunahara and Hiroyuki Furukawa and Takeshi Nishikawa",
note = "Funding Information: This work is supported by NEDO and JSPS grant (26610195). The author A. S. acknowledges support from Dr. M. Nishikino, Dr. T. Kawachi, and Dr. K. Kondo of Japan Atomic Energy Agency. Publisher Copyright: {\textcopyright} 2016 SPIE.; Extreme Ultraviolet (EUV) Lithography VII ; Conference date: 22-02-2016 Through 25-02-2016",
year = "2016",
doi = "10.1117/12.2219045",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Panning, {Eric M.} and Goldberg, {Kenneth A.}",
booktitle = "Extreme Ultraviolet (EUV) Lithography VII",
}