Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.

Original languageEnglish
Title of host publicationExtreme Ultraviolet (EUV) Lithography VII
PublisherSPIE
Volume9776
ISBN (Electronic)9781510600119
DOIs
Publication statusPublished - 2016
EventExtreme Ultraviolet (EUV) Lithography VII - San Jose, United States
Duration: Feb 22 2016Feb 25 2016

Other

OtherExtreme Ultraviolet (EUV) Lithography VII
CountryUnited States
CitySan Jose
Period2/22/162/25/16

Keywords

  • EUV source
  • hydrodynamics
  • laser produced plasma
  • modeling
  • simulation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Sasaki, A., Nishihara, K., Sunahara, A., Furukawa, H., & Nishikawa, T. (2016). Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source. In Extreme Ultraviolet (EUV) Lithography VII (Vol. 9776). [97762C] SPIE. https://doi.org/10.1117/12.2219045