Miniaturized multilayer inductors on GaAs three-dimensional MMIC

Takana Kaho, Motoharu Sasaki, Yo Yamaguchi, Kenjiro Nishikawa, Kazuhiro Uehara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

Original languageEnglish
Title of host publication2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007
Pages149-152
Number of pages4
DOIs
Publication statusPublished - 2007
Externally publishedYes
Event2007 Korea-Japan MicroWave Conference, KJMW 2007 - Naha, Okinawa, Japan
Duration: Nov 15 2007Nov 16 2007

Other

Other2007 Korea-Japan MicroWave Conference, KJMW 2007
CountryJapan
CityNaha, Okinawa
Period11/15/0711/16/07

Fingerprint

Monolithic microwave integrated circuits
Multilayers
performance
Inductance
Millimeter waves
Electromagnetic fields
Natural frequencies
Finite element method
Degradation
Networks (circuits)

Keywords

  • GaAs
  • Multilayer inductors
  • Stacked inductors
  • Three-dimensional MMIC technology

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Communication

Cite this

Kaho, T., Sasaki, M., Yamaguchi, Y., Nishikawa, K., & Uehara, K. (2007). Miniaturized multilayer inductors on GaAs three-dimensional MMIC. In 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007 (pp. 149-152). [4402262] https://doi.org/10.1109/KJMW.2007.4402262

Miniaturized multilayer inductors on GaAs three-dimensional MMIC. / Kaho, Takana; Sasaki, Motoharu; Yamaguchi, Yo; Nishikawa, Kenjiro; Uehara, Kazuhiro.

2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007. 2007. p. 149-152 4402262.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kaho, T, Sasaki, M, Yamaguchi, Y, Nishikawa, K & Uehara, K 2007, Miniaturized multilayer inductors on GaAs three-dimensional MMIC. in 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007., 4402262, pp. 149-152, 2007 Korea-Japan MicroWave Conference, KJMW 2007, Naha, Okinawa, Japan, 11/15/07. https://doi.org/10.1109/KJMW.2007.4402262
Kaho T, Sasaki M, Yamaguchi Y, Nishikawa K, Uehara K. Miniaturized multilayer inductors on GaAs three-dimensional MMIC. In 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007. 2007. p. 149-152. 4402262 https://doi.org/10.1109/KJMW.2007.4402262
Kaho, Takana ; Sasaki, Motoharu ; Yamaguchi, Yo ; Nishikawa, Kenjiro ; Uehara, Kazuhiro. / Miniaturized multilayer inductors on GaAs three-dimensional MMIC. 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007. 2007. pp. 149-152
@inproceedings{7c3a46a33b4047e39fed123c758703e1,
title = "Miniaturized multilayer inductors on GaAs three-dimensional MMIC",
abstract = "Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.",
keywords = "GaAs, Multilayer inductors, Stacked inductors, Three-dimensional MMIC technology",
author = "Takana Kaho and Motoharu Sasaki and Yo Yamaguchi and Kenjiro Nishikawa and Kazuhiro Uehara",
year = "2007",
doi = "10.1109/KJMW.2007.4402262",
language = "English",
isbn = "142441556X",
pages = "149--152",
booktitle = "2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007",

}

TY - GEN

T1 - Miniaturized multilayer inductors on GaAs three-dimensional MMIC

AU - Kaho, Takana

AU - Sasaki, Motoharu

AU - Yamaguchi, Yo

AU - Nishikawa, Kenjiro

AU - Uehara, Kazuhiro

PY - 2007

Y1 - 2007

N2 - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

AB - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

KW - GaAs

KW - Multilayer inductors

KW - Stacked inductors

KW - Three-dimensional MMIC technology

UR - http://www.scopus.com/inward/record.url?scp=48149099638&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48149099638&partnerID=8YFLogxK

U2 - 10.1109/KJMW.2007.4402262

DO - 10.1109/KJMW.2007.4402262

M3 - Conference contribution

SN - 142441556X

SN - 9781424415564

SP - 149

EP - 152

BT - 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007

ER -