Miniaturized multilayer inductors on GaAs three-dimensional MMIC

Takana Kaho, Motoharu Sasaki, Yo Yamaguchi, Kenjiro Nishikawa, Kazuhiro Uehara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

Original languageEnglish
Title of host publication2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007
Pages149-152
Number of pages4
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
Event2007 Korea-Japan MicroWave Conference, KJMW 2007 - Naha, Okinawa, Japan
Duration: Nov 15 2007Nov 16 2007

Publication series

Name2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007

Other

Other2007 Korea-Japan MicroWave Conference, KJMW 2007
CountryJapan
CityNaha, Okinawa
Period11/15/0711/16/07

Keywords

  • GaAs
  • Multilayer inductors
  • Stacked inductors
  • Three-dimensional MMIC technology

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Communication

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  • Cite this

    Kaho, T., Sasaki, M., Yamaguchi, Y., Nishikawa, K., & Uehara, K. (2007). Miniaturized multilayer inductors on GaAs three-dimensional MMIC. In 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007 (pp. 149-152). [4402262] (2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007). https://doi.org/10.1109/KJMW.2007.4402262