Miniaturized multilayer inductors on GaAs three-dimensional MMIC

Takana Kaho; Motoharu Sasaki; Yo Yamaguchi; Kenjiro Nishikawa; Kazuhiro Uehara

doi:10.1109/KJMW.2007.4402262

Miniaturized multilayer inductors on GaAs three-dimensional MMIC

Takana Kaho, Motoharu Sasaki, Yo Yamaguchi, Kenjiro Nishikawa, Kazuhiro Uehara

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

11 Citations (Scopus)

Abstract

Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

Original language	English
Title of host publication	2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007
Pages	149-152
Number of pages	4
DOIs	https://doi.org/10.1109/KJMW.2007.4402262
Publication status	Published - Dec 1 2007
Externally published	Yes
Event	2007 Korea-Japan MicroWave Conference, KJMW 2007 - Naha, Okinawa, Japan Duration: Nov 15 2007 → Nov 16 2007

Publication series

Name	2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007

Other

Other	2007 Korea-Japan MicroWave Conference, KJMW 2007
Country	Japan
City	Naha, Okinawa
Period	11/15/07 → 11/16/07

Keywords

GaAs
Multilayer inductors
Stacked inductors
Three-dimensional MMIC technology

ASJC Scopus subject areas

Electrical and Electronic Engineering
Communication

Access to Document

10.1109/KJMW.2007.4402262

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Miniaturized multilayer inductors on GaAs three-dimensional MMIC. / Kaho, Takana; Sasaki, Motoharu; Yamaguchi, Yo; Nishikawa, Kenjiro; Uehara, Kazuhiro.

2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007. 2007. p. 149-152 4402262 (2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kaho, T, Sasaki, M, Yamaguchi, Y, Nishikawa, K & Uehara, K 2007, Miniaturized multilayer inductors on GaAs three-dimensional MMIC. in 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007., 4402262, 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007, pp. 149-152, 2007 Korea-Japan MicroWave Conference, KJMW 2007, Naha, Okinawa, Japan, 11/15/07. https://doi.org/10.1109/KJMW.2007.4402262

@inproceedings{7c3a46a33b4047e39fed123c758703e1,

title = "Miniaturized multilayer inductors on GaAs three-dimensional MMIC",

abstract = "Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.",

keywords = "GaAs, Multilayer inductors, Stacked inductors, Three-dimensional MMIC technology",

author = "Takana Kaho and Motoharu Sasaki and Yo Yamaguchi and Kenjiro Nishikawa and Kazuhiro Uehara",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/KJMW.2007.4402262",

language = "English",

isbn = "142441556X",

series = "2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007",

pages = "149--152",

booktitle = "2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007",

note = "2007 Korea-Japan MicroWave Conference, KJMW 2007 ; Conference date: 15-11-2007 Through 16-11-2007",

}

TY - GEN

T1 - Miniaturized multilayer inductors on GaAs three-dimensional MMIC

AU - Kaho, Takana

AU - Sasaki, Motoharu

AU - Yamaguchi, Yo

AU - Nishikawa, Kenjiro

AU - Uehara, Kazuhiro

PY - 2007/12/1

Y1 - 2007/12/1

N2 - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

AB - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.

KW - GaAs

KW - Multilayer inductors

KW - Stacked inductors

KW - Three-dimensional MMIC technology

UR - http://www.scopus.com/inward/record.url?scp=48149099638&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48149099638&partnerID=8YFLogxK

U2 - 10.1109/KJMW.2007.4402262

DO - 10.1109/KJMW.2007.4402262

M3 - Conference contribution

AN - SCOPUS:48149099638

SN - 142441556X

SN - 9781424415564

T3 - 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007

SP - 149

EP - 152

BT - 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007

T2 - 2007 Korea-Japan MicroWave Conference, KJMW 2007

Y2 - 15 November 2007 through 16 November 2007

ER -