Abstract
Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.
| Original language | English |
|---|---|
| Title of host publication | 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007 |
| Pages | 149-152 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 2007 Korea-Japan MicroWave Conference, KJMW 2007 - Naha, Okinawa, Japan Duration: Nov 15 2007 → Nov 16 2007 |
Other
| Other | 2007 Korea-Japan MicroWave Conference, KJMW 2007 |
|---|---|
| Country | Japan |
| City | Naha, Okinawa |
| Period | 11/15/07 → 11/16/07 |
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Keywords
- GaAs
- Multilayer inductors
- Stacked inductors
- Three-dimensional MMIC technology
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Communication
Cite this
Miniaturized multilayer inductors on GaAs three-dimensional MMIC. / Kaho, Takana; Sasaki, Motoharu; Yamaguchi, Yo; Nishikawa, Kenjiro; Uehara, Kazuhiro.
2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007. 2007. p. 149-152 4402262.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Miniaturized multilayer inductors on GaAs three-dimensional MMIC
AU - Kaho, Takana
AU - Sasaki, Motoharu
AU - Yamaguchi, Yo
AU - Nishikawa, Kenjiro
AU - Uehara, Kazuhiro
PY - 2007
Y1 - 2007
N2 - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.
AB - Newly developed multi-layer inductors on GaAs three-dimensional MMICs are presented. We tested single-, double-, triple-, and quadruple-layer stacked-type inductors in what may be the first report on inductors on a GaAs MMIC with three or more layers. These proposed multilayer inductors can produce higher inductance in the same area as conventional 2D-MMICs. The performance of the single- and multilayer inductors was measured on wafer and calculated by electromagnetic field analysis using the finite element method. Though they are the same size, the multilayer inductors produce 2-11 times higher inductance than the single-layer inductors. In addition, the degradation of the multilayer inductor performances, such as resistance, Q-factor and self-resonant frequency, was not seen compared with the single-layer inductors. Multilayer inductors make it possible to shrink circuit size from many hundreds of MHz to the millimetre wave.
KW - GaAs
KW - Multilayer inductors
KW - Stacked inductors
KW - Three-dimensional MMIC technology
UR - http://www.scopus.com/inward/record.url?scp=48149099638&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48149099638&partnerID=8YFLogxK
U2 - 10.1109/KJMW.2007.4402262
DO - 10.1109/KJMW.2007.4402262
M3 - Conference contribution
AN - SCOPUS:48149099638
SN - 142441556X
SN - 9781424415564
SP - 149
EP - 152
BT - 2007 Korea-Japan Microwave Conference, KJMW2007, Technical Digest 2007
ER -