Millimeter wave sintering of AlN ceramics for heat sink application

Akira Kishimoto, Tetsuya Morimoto, Hidetaka Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

By using 24 GHz millimeter-wave irradiation, full densification of AlN added with Y2O3 was attained at 1700 °C, which is comparable to 28GHz-wave irradiation. Thermal conductivity of a resultant sample exceeded 200 W/mK, which is the highest value in AlN fabricated in non-reducing atmosphere.

Original languageEnglish
Title of host publicationAsian Ceramic Science for Electronics III and Electroceramics in Japan XII
PublisherTrans Tech Publications Ltd
Pages533-536
Number of pages4
ISBN (Print)0878493069, 9780878493067
DOIs
Publication statusPublished - Jan 1 2010
Event6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan - Tsukuba, Japan
Duration: Oct 22 2008Oct 24 2008

Publication series

NameKey Engineering Materials
Volume421-422
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan
CountryJapan
CityTsukuba
Period10/22/0810/24/08

Keywords

  • AlN
  • Heat sink
  • Millimeter wave
  • Thermal conductivity
  • Yttria

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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