Micro machining of ITO film by LD pumped SHG YAG laser

Yasuhiro Okamoto, Yoshiyuki Uno, Yasuyuki Hirao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

ITO film, which is a kind of transparent conductive film, has been used for LCD, PDF and so on. This film is mostly removed by wet etching method. However, this method needs many chemicals, numbers of process and large-size equipments. On the other hand, laser beam processing can achieve the dry process without chemicals and drastically reduces the number of process. Therefore, selective removal of ITO film on glass substrate by LD pumped Q-switch SHG YAG laser is experimentally investigated. Electric insulation across machined groove was successful. Better groove shape can be obtained by accurate control of defocused distance and feed rate under a constant average power. Using SHG YAG laser makes it possible to remove only ITO film without any damage to glass material as substrate, since SHG YAG laser of 532 nm in wavelength is easy to transmit the glass material. When laser beam is irradiated from ITO film to glass material, a non-removed portion of ITO film remains at the bottom of groove under long defocused distance condition. On the other hand, backside irradiation method, in which laser beam is irradiated to ITO film through glass material, can prevent from remaining a non-removed portion, since absorption of laser beam occurs from the boundary part between ITO film and glass material.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsI. Miyamoto, K.F. Kobayashi, K. Sugioka, R. Poprawe, H. Helvajian
Pages40-45
Number of pages6
Volume4830
DOIs
Publication statusPublished - 2002
EventThird International Symposium on Laser Precision Microfabrication - Osaka, Japan
Duration: May 27 2002May 31 2002

Other

OtherThird International Symposium on Laser Precision Microfabrication
CountryJapan
CityOsaka
Period5/27/025/31/02

Fingerprint

ITO (semiconductors)
machining
YAG lasers
Machining
Lasers
Glass
Laser beams
glass
laser beams
grooves
Electric insulation
Conductive films
Wet etching
Substrates
Liquid crystal displays
insulation
Switches
Irradiation
switches
etching

Keywords

  • Backside irradiation
  • ITO film
  • LD pumped
  • SHG YAG laser
  • Transparent electrode

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Okamoto, Y., Uno, Y., & Hirao, Y. (2002). Micro machining of ITO film by LD pumped SHG YAG laser. In I. Miyamoto, K. F. Kobayashi, K. Sugioka, R. Poprawe, & H. Helvajian (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4830, pp. 40-45) https://doi.org/10.1117/12.486573

Micro machining of ITO film by LD pumped SHG YAG laser. / Okamoto, Yasuhiro; Uno, Yoshiyuki; Hirao, Yasuyuki.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / I. Miyamoto; K.F. Kobayashi; K. Sugioka; R. Poprawe; H. Helvajian. Vol. 4830 2002. p. 40-45.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Okamoto, Y, Uno, Y & Hirao, Y 2002, Micro machining of ITO film by LD pumped SHG YAG laser. in I Miyamoto, KF Kobayashi, K Sugioka, R Poprawe & H Helvajian (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4830, pp. 40-45, Third International Symposium on Laser Precision Microfabrication, Osaka, Japan, 5/27/02. https://doi.org/10.1117/12.486573
Okamoto Y, Uno Y, Hirao Y. Micro machining of ITO film by LD pumped SHG YAG laser. In Miyamoto I, Kobayashi KF, Sugioka K, Poprawe R, Helvajian H, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4830. 2002. p. 40-45 https://doi.org/10.1117/12.486573
Okamoto, Yasuhiro ; Uno, Yoshiyuki ; Hirao, Yasuyuki. / Micro machining of ITO film by LD pumped SHG YAG laser. Proceedings of SPIE - The International Society for Optical Engineering. editor / I. Miyamoto ; K.F. Kobayashi ; K. Sugioka ; R. Poprawe ; H. Helvajian. Vol. 4830 2002. pp. 40-45
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