Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser

Hikaru Nakamura, Yasuhiro Okamoto, Yoshiyuki Uno

Research output: Contribution to conferencePaper

Abstract

Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.

Original languageEnglish
Publication statusPublished - Dec 1 2007
Event4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
Duration: Nov 7 2007Nov 9 2007

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
CountryJapan
CityFukuoka
Period11/7/0711/9/07

Keywords

  • Ceramics
  • Harmonics of Nd: YAG laser
  • Micro-drilling
  • Removal depth

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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    Nakamura, H., Okamoto, Y., & Uno, Y. (2007). Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser. Paper presented at 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007, Fukuoka, Japan.