Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser

Hikaru Nakamura, Yasuhiro Okamoto, Yoshiyuki Uno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.

Original languageEnglish
Title of host publicationLEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings
Publication statusPublished - 2007
Event4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan
Duration: Nov 7 2007Nov 9 2007

Other

Other4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
CountryJapan
CityFukuoka
Period11/7/0711/9/07

Fingerprint

Machining
Wavelength
Thermal expansion
Lasers
Drilling

Keywords

  • Ceramics
  • Harmonics of Nd: YAG laser
  • Micro-drilling
  • Removal depth

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Nakamura, H., Okamoto, Y., & Uno, Y. (2007). Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser. In LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings

Micro-machining Characteristics of Ceramics by Harmonics of Nd : YAG laser. / Nakamura, Hikaru; Okamoto, Yasuhiro; Uno, Yoshiyuki.

LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nakamura, H, Okamoto, Y & Uno, Y 2007, Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser. in LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007, Fukuoka, Japan, 11/7/07.
Nakamura H, Okamoto Y, Uno Y. Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser. In LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007
Nakamura, Hikaru ; Okamoto, Yasuhiro ; Uno, Yoshiyuki. / Micro-machining Characteristics of Ceramics by Harmonics of Nd : YAG laser. LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings. 2007.
@inproceedings{74a0355a4f60459aa693c68ae5fb2eb9,
title = "Micro-machining Characteristics of Ceramics by Harmonics of Nd: YAG laser",
abstract = "Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.",
keywords = "Ceramics, Harmonics of Nd: YAG laser, Micro-drilling, Removal depth",
author = "Hikaru Nakamura and Yasuhiro Okamoto and Yoshiyuki Uno",
year = "2007",
language = "English",
booktitle = "LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings",

}

TY - GEN

T1 - Micro-machining Characteristics of Ceramics by Harmonics of Nd

T2 - YAG laser

AU - Nakamura, Hikaru

AU - Okamoto, Yasuhiro

AU - Uno, Yoshiyuki

PY - 2007

Y1 - 2007

N2 - Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.

AB - Effect of wavelength on machining characteristics of AlN and SiC in micro-drilling using Q-swithched YAG harmonic was experimentally investigated. The drilled depth increased with the decrease of wavelength. Besides, under the reduced pressure condition, the drilled depth increased and the better surface integrity could be obtained compared to the atmospheric condition. The circumference region around drilled hole was oxidized, and the oxidization in the case of fourth harmonic was more remarkable than that in second harmonic. In the initial stage of drilling for AlN, the thermal expansion was observed at the irradiated point in the case of fundamental wavelength, while higher harmonic made it possible to drill without thermal expansion.

KW - Ceramics

KW - Harmonics of Nd: YAG laser

KW - Micro-drilling

KW - Removal depth

UR - http://www.scopus.com/inward/record.url?scp=84883363974&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883363974&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84883363974

BT - LEM 2007 - 4th International Conference on Leading Edge Manufacturing in 21st Century, Proceedings

ER -