Metal deposition deep into microstructure by electroless plating

Nobuyuki Takeyasu; Takuo Tanaka; Satoshi Kawata

doi:10.1143/JJAP.44.L1134

Metal deposition deep into microstructure by electroless plating

Nobuyuki Takeyasu, Takuo Tanaka, Satoshi Kawata

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

It is generally difficult to deposit metal on an occluded part of a structure or inside a long tubular structure. In this paper, we report an electroless plating method that is useful for metal deposition onto internal obscured regions of a complex structure, and we show that the technique can deposit metal over a wide area. We demonstrate gold deposition inside a capillary tube and a complex concave structure of micrometer scale consisting of polystyrene microbeads sandwiched between glass plates.

Original language	English
Pages (from-to)	L1134-L1137
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	33-36
DOIs	https://doi.org/10.1143/JJAP.44.L1134
Publication status	Published - Aug 26 2005
Externally published	Yes

Keywords

3D microstructure
Electroless plating
Gold
Latex beads
Metal coating
Silver

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L1134

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T1 - Metal deposition deep into microstructure by electroless plating

AU - Takeyasu, Nobuyuki

AU - Tanaka, Takuo

AU - Kawata, Satoshi

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Y1 - 2005/8/26

N2 - It is generally difficult to deposit metal on an occluded part of a structure or inside a long tubular structure. In this paper, we report an electroless plating method that is useful for metal deposition onto internal obscured regions of a complex structure, and we show that the technique can deposit metal over a wide area. We demonstrate gold deposition inside a capillary tube and a complex concave structure of micrometer scale consisting of polystyrene microbeads sandwiched between glass plates.

AB - It is generally difficult to deposit metal on an occluded part of a structure or inside a long tubular structure. In this paper, we report an electroless plating method that is useful for metal deposition onto internal obscured regions of a complex structure, and we show that the technique can deposit metal over a wide area. We demonstrate gold deposition inside a capillary tube and a complex concave structure of micrometer scale consisting of polystyrene microbeads sandwiched between glass plates.

KW - 3D microstructure

KW - Electroless plating

KW - Gold

KW - Latex beads

KW - Metal coating

KW - Silver

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JF - Japanese Journal of Applied Physics, Part 2: Letters

SN - 0021-4922

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Metal deposition deep into microstructure by electroless plating

Abstract

Keywords

ASJC Scopus subject areas

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