Measurement of micro-wave dielectric properties of SrTiO3 substrate thin plates using planar electrodes

Takakiyo Harigai; Takashi Teranishi; Song Min Nam; Hirofumi Kakemoto; Satoshi Wada; Takaaki Tsurumi

Measurement of micro-wave dielectric properties of SrTiO₃ substrate thin plates using planar electrodes

Takakiyo Harigai, Takashi Teranishi, Song Min Nam, Hirofumi Kakemoto, Satoshi Wada, Takaaki Tsurumi

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO₃ single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (ε_r = 310) [1].

Original language	English
Pages (from-to)	215-218
Number of pages	4
Journal	Key Engineering Materials
Volume	269
Publication status	Published - Jan 1 2004
Externally published	Yes
Event	Proceedings of the 23rd Electronics Division Meeting of the Ceramic Society of Japan - Kawasaki, Japan Duration: Oct 23 2003 → Oct 24 2003

Keywords

Dielectric Property
Electromagnetic Analysis
Micro-wave Dielectric
Planar Electrode

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "Measurement of micro-wave dielectric properties of SrTiO3 substrate thin plates using planar electrodes",

abstract = "In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO3 single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (εr = 310) [1].",

keywords = "Dielectric Property, Electromagnetic Analysis, Micro-wave Dielectric, Planar Electrode",

author = "Takakiyo Harigai and Takashi Teranishi and Nam, {Song Min} and Hirofumi Kakemoto and Satoshi Wada and Takaaki Tsurumi",

year = "2004",

month = jan,

day = "1",

language = "English",

volume = "269",

pages = "215--218",

journal = "Key Engineering Materials",

issn = "1013-9826",

publisher = "Trans Tech Publications",

note = "Proceedings of the 23rd Electronics Division Meeting of the Ceramic Society of Japan ; Conference date: 23-10-2003 Through 24-10-2003",

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TY - JOUR

T1 - Measurement of micro-wave dielectric properties of SrTiO3 substrate thin plates using planar electrodes

AU - Harigai, Takakiyo

AU - Teranishi, Takashi

AU - Nam, Song Min

AU - Kakemoto, Hirofumi

AU - Wada, Satoshi

AU - Tsurumi, Takaaki

PY - 2004/1/1

Y1 - 2004/1/1

N2 - In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO3 single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (εr = 310) [1].

AB - In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO3 single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (εr = 310) [1].

KW - Dielectric Property

KW - Electromagnetic Analysis

KW - Micro-wave Dielectric

KW - Planar Electrode

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UR - http://www.scopus.com/inward/citedby.url?scp=8644222167&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:8644222167

SN - 1013-9826

VL - 269

SP - 215

EP - 218

JO - Key Engineering Materials

JF - Key Engineering Materials

T2 - Proceedings of the 23rd Electronics Division Meeting of the Ceramic Society of Japan

Y2 - 23 October 2003 through 24 October 2003

ER -

Measurement of micro-wave dielectric properties of SrTiO₃ substrate thin plates using planar electrodes

Abstract

Keywords

ASJC Scopus subject areas

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