Measurement of micro-wave dielectric properties of SrTiO3 substrate thin plates using planar electrodes

Takakiyo Harigai, Takasi Teranisi, Song Min Nam, Hirofumi Kakemoto, Satoshi Wada, Takaaki Tsurumi

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3 Citations (Scopus)

Abstract

In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO3 single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (εr = 310) [1].

Original languageEnglish
Pages (from-to)215-218
Number of pages4
JournalKey Engineering Materials
Volume269
Publication statusPublished - 2004
Externally publishedYes

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Keywords

  • Dielectric Property
  • Electromagnetic Analysis
  • Micro-wave Dielectric
  • Planar Electrode

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemical Engineering (miscellaneous)

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