Machining characteristics of aluminum nitride by harmonics of Nd:YAG laser

Y. Okamoto, N. Kataoka, Y. Uno, I. Tanino, S. Nakashiba

Research output: Contribution to conferencePaper

Abstract

Influence of wavelength and the kind of assist gas on machining characteristics of aluminum nitride using Q-switched Nd:YAG harmonics were experimentally investigated. Removal rate increases with the reduction of wavelength. Drilled depth increases proportionally with the number of laser shot at the beginning region of machining, while it stagnates after the proportional region. Drilled depth was greatly different by the land of assist gas in the case of fundamental wavelength, while it was not influenced sensitively by the land of assist gas in the case of harmonics because of its high photon energy. Debris was deposited remarkably except for fundamental wavelength, when blind hole is drilled using helium as the assist gas.

Original languageEnglish
Pages269-272
Number of pages4
Publication statusPublished - Dec 1 2005
Event3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan
Duration: Oct 19 2005Oct 22 2005

Other

Other3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
CountryJapan
CityNagoya
Period10/19/0510/22/05

Keywords

  • Aluminum nitride
  • Drilling
  • Harmonics
  • YAG laser

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Fingerprint Dive into the research topics of 'Machining characteristics of aluminum nitride by harmonics of Nd:YAG laser'. Together they form a unique fingerprint.

  • Cite this

    Okamoto, Y., Kataoka, N., Uno, Y., Tanino, I., & Nakashiba, S. (2005). Machining characteristics of aluminum nitride by harmonics of Nd:YAG laser. 269-272. Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan.