Low damage smoothing of magnetic material films using a gas cluster ion beam

S. Kakuta, S. Sasaki, T. Hirano, K. Ueda, T. Seki, S. Ninomiya, Masaki Hada, J. Matsuo

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

This paper proposes a low damage smoothing process for magnetic materials using a gas cluster ion beam (GCIB). In order to achieve low damage processing, the effect of incident angle was investigated. Depth profiles of major elements constituting the films were measured by secondary ion mass spectroscopy (SIMS). The film structure and the lattice spacing were obtained by X-ray reflectivity (XRR) and grazing incident X-ray diffraction (XRD), respectively. After the GCIB irradiation at an acceleration voltage of 20 kV and incident angle of 80° with simultaneous rotation, a smooth surface of a PtMn film was obtained, with an average roughness of 1.2 nm. A damaged layer thickness of less than 1.5 nm was achieved under these conditions. Using the oblique GCIB irradiation, the PtMn film was etched without any change in the strain profile. Thus, the GCIB could be utilized to obtain surfaces of magnetic devices with extremely shallow damage.

Original languageEnglish
Pages (from-to)677-682
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume257
Issue number1-2 SPEC. ISS.
DOIs
Publication statusPublished - Apr 2007
Externally publishedYes

Fingerprint

Magnetic materials
magnetic materials
smoothing
Ion beams
Gases
ion beams
damage
gases
Irradiation
Magnetic devices
irradiation
grazing
profiles
x rays
roughness
mass spectroscopy
Surface roughness
spacing
Spectroscopy
Ions

Keywords

  • Gas cluster ion beam
  • Ion irradiation damage
  • Magnetic materials
  • Surface smoothing

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Low damage smoothing of magnetic material films using a gas cluster ion beam. / Kakuta, S.; Sasaki, S.; Hirano, T.; Ueda, K.; Seki, T.; Ninomiya, S.; Hada, Masaki; Matsuo, J.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 257, No. 1-2 SPEC. ISS., 04.2007, p. 677-682.

Research output: Contribution to journalArticle

Kakuta, S. ; Sasaki, S. ; Hirano, T. ; Ueda, K. ; Seki, T. ; Ninomiya, S. ; Hada, Masaki ; Matsuo, J. / Low damage smoothing of magnetic material films using a gas cluster ion beam. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2007 ; Vol. 257, No. 1-2 SPEC. ISS. pp. 677-682.
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