Abstract
This paper proposes a low damage smoothing process for magnetic materials using a gas cluster ion beam (GCIB). In order to achieve low damage processing, the effect of incident angle was investigated. Depth profiles of major elements constituting the films were measured by secondary ion mass spectroscopy (SIMS). The film structure and the lattice spacing were obtained by X-ray reflectivity (XRR) and grazing incident X-ray diffraction (XRD), respectively. After the GCIB irradiation at an acceleration voltage of 20 kV and incident angle of 80° with simultaneous rotation, a smooth surface of a PtMn film was obtained, with an average roughness of 1.2 nm. A damaged layer thickness of less than 1.5 nm was achieved under these conditions. Using the oblique GCIB irradiation, the PtMn film was etched without any change in the strain profile. Thus, the GCIB could be utilized to obtain surfaces of magnetic devices with extremely shallow damage.
| Original language | English |
|---|---|
| Pages (from-to) | 677-682 |
| Number of pages | 6 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 257 |
| Issue number | 1-2 SPEC. ISS. |
| DOIs | |
| Publication status | Published - Apr 2007 |
| Externally published | Yes |
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Keywords
- Gas cluster ion beam
- Ion irradiation damage
- Magnetic materials
- Surface smoothing
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Instrumentation
- Surfaces and Interfaces
Cite this
Low damage smoothing of magnetic material films using a gas cluster ion beam. / Kakuta, S.; Sasaki, S.; Hirano, T.; Ueda, K.; Seki, T.; Ninomiya, S.; Hada, Masaki; Matsuo, J.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 257, No. 1-2 SPEC. ISS., 04.2007, p. 677-682.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Low damage smoothing of magnetic material films using a gas cluster ion beam
AU - Kakuta, S.
AU - Sasaki, S.
AU - Hirano, T.
AU - Ueda, K.
AU - Seki, T.
AU - Ninomiya, S.
AU - Hada, Masaki
AU - Matsuo, J.
PY - 2007/4
Y1 - 2007/4
N2 - This paper proposes a low damage smoothing process for magnetic materials using a gas cluster ion beam (GCIB). In order to achieve low damage processing, the effect of incident angle was investigated. Depth profiles of major elements constituting the films were measured by secondary ion mass spectroscopy (SIMS). The film structure and the lattice spacing were obtained by X-ray reflectivity (XRR) and grazing incident X-ray diffraction (XRD), respectively. After the GCIB irradiation at an acceleration voltage of 20 kV and incident angle of 80° with simultaneous rotation, a smooth surface of a PtMn film was obtained, with an average roughness of 1.2 nm. A damaged layer thickness of less than 1.5 nm was achieved under these conditions. Using the oblique GCIB irradiation, the PtMn film was etched without any change in the strain profile. Thus, the GCIB could be utilized to obtain surfaces of magnetic devices with extremely shallow damage.
AB - This paper proposes a low damage smoothing process for magnetic materials using a gas cluster ion beam (GCIB). In order to achieve low damage processing, the effect of incident angle was investigated. Depth profiles of major elements constituting the films were measured by secondary ion mass spectroscopy (SIMS). The film structure and the lattice spacing were obtained by X-ray reflectivity (XRR) and grazing incident X-ray diffraction (XRD), respectively. After the GCIB irradiation at an acceleration voltage of 20 kV and incident angle of 80° with simultaneous rotation, a smooth surface of a PtMn film was obtained, with an average roughness of 1.2 nm. A damaged layer thickness of less than 1.5 nm was achieved under these conditions. Using the oblique GCIB irradiation, the PtMn film was etched without any change in the strain profile. Thus, the GCIB could be utilized to obtain surfaces of magnetic devices with extremely shallow damage.
KW - Gas cluster ion beam
KW - Ion irradiation damage
KW - Magnetic materials
KW - Surface smoothing
UR - http://www.scopus.com/inward/record.url?scp=33947620998&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33947620998&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2007.01.110
DO - 10.1016/j.nimb.2007.01.110
M3 - Article
AN - SCOPUS:33947620998
VL - 257
SP - 677
EP - 682
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1-2 SPEC. ISS.
ER -