Long-life multiple-ISFETS with polymeric gates

K. Tsukada, M. Sebata, Y. Miyahara, H. Miyagi

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

Long-life, integrated multiple-ISFETs with CMOS interface circuits have been developed. The interface circuits are designed for impedance conversion and rapid multiplexing of the signal from each ISFET. Three kinds of ion-selective membranes for sodium, potassium and chloride are formed on the gates and separated by a patterned thick polyimide layer. The poor adhesion of the polymeric membrane to the ISFET gate is improved by selecting the proper plasticizer for use in the membrane. As a result, a chemical response for sodium, potassium and chloride can be obtained for more than two months.

Original languageEnglish
Pages (from-to)329-336
Number of pages8
JournalSensors and Actuators
Volume18
Issue number3-4
DOIs
Publication statusPublished - Jul 1989
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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