Local laser joining of glass and silicon

Assi Hansen; Tiina Amberla; Yasuhiro Okamoto; Isamu Miyamoto

Local laser joining of glass and silicon

Assi Hansen, Tiina Amberla, Yasuhiro Okamoto, Isamu Miyamoto

Research output: Contribution to conference › Paper

Abstract

In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.

Original language	English
Pages	372-378
Number of pages	7
Publication status	Published - Dec 1 2012
Event	31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States Duration: Sep 23 2012 → Sep 27 2012

Other

Other	31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
Country	United States
City	Anaheim, CA
Period	9/23/12 → 9/27/12

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials

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title = "Local laser joining of glass and silicon",

abstract = "In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.",

author = "Assi Hansen and Tiina Amberla and Yasuhiro Okamoto and Isamu Miyamoto",

year = "2012",

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note = "31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 ; Conference date: 23-09-2012 Through 27-09-2012",

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AU - Hansen, Assi

AU - Amberla, Tiina

AU - Okamoto, Yasuhiro

AU - Miyamoto, Isamu

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N2 - In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.

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