Local laser joining of glass and silicon

Assi Hansen, Tiina Amberla, Yasuhiro Okamoto, Isamu Miyamoto

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.

Original languageEnglish
Title of host publicationICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics
Pages372-378
Number of pages7
Publication statusPublished - 2012
Event31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States
Duration: Sep 23 2012 → Sep 27 2012

Other

Other31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
CountryUnited States
CityAnaheim, CA
Period9/23/12 → 9/27/12

Fingerprint

Silicon
Joining
Glass
Lasers
Fiber lasers
Pulsed lasers
Processing
Industry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Hansen, A., Amberla, T., Okamoto, Y., & Miyamoto, I. (2012). Local laser joining of glass and silicon. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics (pp. 372-378)

Local laser joining of glass and silicon. / Hansen, Assi; Amberla, Tiina; Okamoto, Yasuhiro; Miyamoto, Isamu.

ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 372-378.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hansen, A, Amberla, T, Okamoto, Y & Miyamoto, I 2012, Local laser joining of glass and silicon. in ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. pp. 372-378, 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012, Anaheim, CA, United States, 9/23/12.
Hansen A, Amberla T, Okamoto Y, Miyamoto I. Local laser joining of glass and silicon. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 372-378
Hansen, Assi ; Amberla, Tiina ; Okamoto, Yasuhiro ; Miyamoto, Isamu. / Local laser joining of glass and silicon. ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. pp. 372-378
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