Abstract
In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.
| Original language | English |
|---|---|
| Pages | 372-378 |
| Number of pages | 7 |
| Publication status | Published - Dec 1 2012 |
| Event | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States Duration: Sep 23 2012 → Sep 27 2012 |
Other
| Other | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 |
|---|---|
| Country | United States |
| City | Anaheim, CA |
| Period | 9/23/12 → 9/27/12 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
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Hansen, A., Amberla, T., Okamoto, Y., & Miyamoto, I. (2012). Local laser joining of glass and silicon. 372-378. Paper presented at 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012, Anaheim, CA, United States.