Local laser joining of glass and silicon

Assi Hansen, Tiina Amberla, Yasuhiro Okamoto, Isamu Miyamoto

Research output: Contribution to conferencePaper

Abstract

In this work, glass and silicon laser joining was studied using picosecond pulsed fibre laser. This study is aimed at exploring the use of lasers for micro scale processing of glass and silicon, the most commonly used materials in the IC industry.

Original languageEnglish
Pages372-378
Number of pages7
Publication statusPublished - Dec 1 2012
Event31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States
Duration: Sep 23 2012Sep 27 2012

Other

Other31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
CountryUnited States
CityAnaheim, CA
Period9/23/129/27/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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