Light-driven actuator using hydrothermally deposited PLZT film

Daisuke Yamaguchi, Akimasa Tonokai, Takefumi Kanda, Koichi Suzumori

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.

Original languageEnglish
Pages (from-to)330-336
Number of pages7
JournalIEEJ Transactions on Sensors and Micromachines
Volume133
Issue number8
DOIs
Publication statusPublished - 2013

Fingerprint

Actuators
Piezoelectricity
Electric currents
Tin oxides
Indium
Ferroelectric materials
Titanium
Diffraction
Flow rate
X rays
Electrodes
Substrates
Temperature
Ultraviolet Rays

Keywords

  • Hydrothermal method
  • Light-driven actuator
  • Photostrictive effect
  • Piezoelectric material
  • PLZT film

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Light-driven actuator using hydrothermally deposited PLZT film. / Yamaguchi, Daisuke; Tonokai, Akimasa; Kanda, Takefumi; Suzumori, Koichi.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 133, No. 8, 2013, p. 330-336.

Research output: Contribution to journalArticle

Yamaguchi, Daisuke ; Tonokai, Akimasa ; Kanda, Takefumi ; Suzumori, Koichi. / Light-driven actuator using hydrothermally deposited PLZT film. In: IEEJ Transactions on Sensors and Micromachines. 2013 ; Vol. 133, No. 8. pp. 330-336.
@article{fc3b5166ce674b6a94efbb8faf7b41d6,
title = "Light-driven actuator using hydrothermally deposited PLZT film",
abstract = "Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.",
keywords = "Hydrothermal method, Light-driven actuator, Photostrictive effect, Piezoelectric material, PLZT film",
author = "Daisuke Yamaguchi and Akimasa Tonokai and Takefumi Kanda and Koichi Suzumori",
year = "2013",
doi = "10.1541/ieejsmas.133.330",
language = "English",
volume = "133",
pages = "330--336",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "8",

}

TY - JOUR

T1 - Light-driven actuator using hydrothermally deposited PLZT film

AU - Yamaguchi, Daisuke

AU - Tonokai, Akimasa

AU - Kanda, Takefumi

AU - Suzumori, Koichi

PY - 2013

Y1 - 2013

N2 - Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.

AB - Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.

KW - Hydrothermal method

KW - Light-driven actuator

KW - Photostrictive effect

KW - Piezoelectric material

KW - PLZT film

UR - http://www.scopus.com/inward/record.url?scp=84883140155&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883140155&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.133.330

DO - 10.1541/ieejsmas.133.330

M3 - Article

AN - SCOPUS:84883140155

VL - 133

SP - 330

EP - 336

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 8

ER -