Abstract
A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.
| Original language | English |
|---|---|
| Pages (from-to) | 2058-2060 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 28 |
| Issue number | 21 |
| DOIs | |
| Publication status | Published - Nov 1 2003 |
| Externally published | Yes |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics