Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

Toshihiko Kiwa, Masayoshi Tonouchi, Masatsugu Yamashita, Kodo Kawase

Research output: Contribution to journalArticle

142 Citations (Scopus)

Abstract

A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.

Original languageEnglish
Pages (from-to)2058-2060
Number of pages3
JournalOptics Letters
Volume28
Issue number21
DOIs
Publication statusPublished - Nov 1 2003
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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