Isotope effects on the dissociation of a hydrogen-carbon complex in silicon

Yoichi Kamiura; Kazuhisa Fukuda; Shigeki Ohyama; Yoshifumi Yamashita

doi:10.1143/jjap.39.1098

Isotope effects on the dissociation of a hydrogen-carbon complex in silicon

Yoichi Kamiura, Kazuhisa Fukuda, Shigeki Ohyama, Yoshifumi Yamashita

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We have found, by deep-level transient spectroscopy (DLTS), that the dissociation rate of a deuterium-carbon complex in silicon is about half that of a hydrogen-carbon complex, while the activation energies for the dissociation of both the complexes are the same. This clearly proves that both the complexes have the same atomic configuration and their dissociation is governed by the atomic jump of hydrogen (deuterium).

Original language	English
Pages (from-to)	1098-1099
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	39
Issue number	3 A
DOIs	https://doi.org/10.1143/jjap.39.1098
Publication status	Published - 2000

Keywords

Carbon
DLTS
Defect
Dissociation
Hydrogen
Si

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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T1 - Isotope effects on the dissociation of a hydrogen-carbon complex in silicon

AU - Kamiura, Yoichi

AU - Fukuda, Kazuhisa

AU - Ohyama, Shigeki

AU - Yamashita, Yoshifumi

PY - 2000

Y1 - 2000

N2 - We have found, by deep-level transient spectroscopy (DLTS), that the dissociation rate of a deuterium-carbon complex in silicon is about half that of a hydrogen-carbon complex, while the activation energies for the dissociation of both the complexes are the same. This clearly proves that both the complexes have the same atomic configuration and their dissociation is governed by the atomic jump of hydrogen (deuterium).

AB - We have found, by deep-level transient spectroscopy (DLTS), that the dissociation rate of a deuterium-carbon complex in silicon is about half that of a hydrogen-carbon complex, while the activation energies for the dissociation of both the complexes are the same. This clearly proves that both the complexes have the same atomic configuration and their dissociation is governed by the atomic jump of hydrogen (deuterium).

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KW - Dissociation

KW - Hydrogen

KW - Si

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