Investigation on micro-machining characteristics and phenomenon of semiconductor materials by harmonics of Nd:YAG laser

Takayuki Hirano, Yasuhiro Okamoto, Akira Okada, Yoshiyuki Uno, Tomokazu Sakagawa, Shin Ichi Nakashiba

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science

Chemical Compounds