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Investigation on micro-machining characteristics and phenomenon of semiconductor materials by harmonics of Nd:YAG laser
Takayuki Hirano, Yasuhiro Okamoto, Akira Okada, Yoshiyuki Uno, Tomokazu Sakagawa, Shin Ichi Nakashiba
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)